Used VARIAN 3118 #9358260 for sale
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ID: 9358260
Evaporator
(4) Pockets AIRCO TEMESCAL E-Guns
Manual pocket rotation
AC Glow discharge
AIRCO CV-8 Power supply
With XY sweep
VHS-6 Diffusion pump
Neutral density filter
SYCON Monitor and controller
Bell jar, 18"
Base plate.
VARIAN 3118 is a high-precision, high-throughput sputtering equipment for the deposition of thin metal films onto substrates such as semiconductor wafers. As one of VARIAN flagship sputtering systems, 3118 offers state of the art technology with exceptional performance and reliability. The system is comprised of up to 18 magnetically enhanced diode sputter sources capable of coating a variety of substrates with noble metals, semi-conductors and dielectrics materials. VARIAN 3118 unit includes dual digital temperature controllers for precise substrate temperature control in the range from room temperature to 500C. A six-position robotic substrate handling machine enables efficient substrate transfer for the simultaneous deposition of multi-layer films. 3118 is equipped with a loadlock tool which allows for rapid substrate exchanges in vacuum, rapid pressure cycles and uniform substrate heating from room temperature to 500C. The asset also features an open design, which allows for easy access for maintenance and adjustment. VARIAN 3118 Sputtering Model also includes a series of computerized control systems that provide precise monitoring and control of pressure, temperature, power, deposition rate, and other critical parameters. The sophisticated computer software allows for the real-time monitoring and manipulation of deposition parameters and ensures the robustness and reliability of the process results. 3118 is capable of creating a wide range of high quality thin film materials for use in a variety of applications such as semiconductor device fabrication, microelectronic processing, and thin film solar cells. The equipment is highly suitable for use in both research laboratories and production facilities.
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