Used VARIAN 3180 #83199 for sale
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VARIAN 3180 is an ideal sputtering equipment that is used widely in research and industrial applications. It is a dual-source, parallel cluster sputter system that allows for high-velocity evaporation with a large chamber size and a minimal distance to the wafer. The unit includes two independent physical vapor deposition sources - a vertical source that can be tilted, and a horizontal source uniquely able to be positioned vertically. This innovative arrangement ensures optimal speed and uniformity of the sputtering and allows the machine to be precisely tuned for superior control and reliability. The output of 3180 sputtering tool is extremely stable and is rated for a sputter rate of up to 5-6 nm/min. This asset is also able to sputter any material desired which makes it suitable for a wide variety of applications. It has the capability to deposit broad spectral range materials from metals to ceramics, resistive and dielectric films. The model itself is designed for easy access to the main components. It has a full-length side door on the chamber that allows for easy access, monitoring, and instrument cleaning. The chamber also features two independent sputter sources; two feed-throughs, two shuttered pneumatic ports, and a dynamic internal shutter equipment with ultra-low-vacuum capabilities. The chamber design is also highly optimized for minimal turbulence and optimal uniformity of deposition. The system includes automated process control, computer simulation and data acquisition that allows it to be easily programmed for desired processes. An external control computer allows for unattended operation and data transfer. It is designed for a wide range of environmental conditions, including temperature ranges from +10°C to +40°C, and relative humidity from 0% to 50%. VARIAN 3180 is an excellent choice for those requiring a reliable, high-performance sputtering unit. The machine's performance is perfect for thin film, dielectric and wear resistant studies, microelectronic devices, and many other research and industrial applications.
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