Used VARIAN 3180 #9278289 for sale

VARIAN 3180 is a state-of-the-art sputtering equipment designed for the deposition of thin films. It offers excellent performance and control for a range of sputtering applications. Using a three-axis motion control system with an integrated 6-station rotatable substrate holder, 3180 ensures precise film deposition rates and uniformity. The unit has a large 3" (76 mm) sputter gun that is protected against fumes and particles by a fume shield. Up to four sputter guns can be connected to the machine, allowing for both single-target and dual-target deposition for increased throughput. VARIAN 3180 is equipped with a Vacuum 10.1 interface for simultaneous monitoring and control of the deposition process. This controller allows users to monitor and control the deposition rate, flow rate, pressure and temperature. The tool includes real-time temperature and frequency control for uniform deposition. It also supports up to seven process gases, including argon, oxygen, nitrogen, hydrogen and halogens. The asset can reach pressures as low as 1 x 10-4 Torr, the highest achievable by any commercial sputter model. This makes it suitable for ultra-high vacuum sputtering applications such as thin film photovoltaics and microelectronics applications. The equipment is compatible with virtually any substrate material, and can accommodate substrates up to 8" (200 mm) in diameter. The system features a graphite filament unit which offers excellent uniformity and low erosion rates, even at high operating temperatures. The graphite filament machine also reduces the amount of electrons reaching the substrate, making it ideal for high temperature processes. Finally, 3180 offers excellent safety features, with an easy access design for maintenance and repair. It is also equipped with a lateral motion safety feature that prevents any unwanted motion of the sputter gun while the tool is running. In conclusion, VARIAN 3180 is a powerful and reliable sputter asset ideal for a wide range of applications. It offers excellent performance, precision and control, with features such as a Vacuum 10.1 controller, real-time temperature and frequency control and a graphite filament model.