Used VARIAN 3190 #9277865 for sale

VARIAN 3190 is a mobile sputtering equipment designed for advanced thin film deposition. It features a 6-station process chamber configuration, and is equipped with state-of-the-art electronics and components, providing reliable and repeatable results. The process chamber, capable of up to six sputter chambers, provides independent control over each process chamber, allowing for complex layer construction and easy recipe transfers. The chamber is vacuum compatible, with a fast pump down time of under 5 minutes. With a built-in turbo-molecular RGA, it is capable of controlling the chamber pressure to ultimate pressure under 10-6 Torr. The chambers can be configured with planar, line, or column targets of up to 14" x 8" and provide power levels of up to 5000 watts. 3190 is equipped with an advanced process control system which can be used to monitor the sputter rate, source current, substrate temperature, deposition rate, and other process parameters. The process control unit allows for the optimization of processing parameters in order to achieve the best possible results. The machine is a highly automated process, with recipes stored to the internal PC. This allows for the rapid setup and transfer of recipes, as well as easier process tracking and process optimization. In addition, VARIAN 3190 is capable of depositing a wide range of materials, including metals, oxides, and nitrides, and supports a wide range of deposition techniques, from direct current (DC) to high frequency (HF) sputtering, electron-cyclotron resonance (ECR) sputtering, and close-coupled magnetron sputtering. 3190 offers an excellent choice for laboratory and industrial sputtering applications, offering a reliable, repeatable process with variable coaters and excellent low-k processing capabilities. With its robust design, versatile process capability, and advanced process control, VARIAN 3190 represents one of the best sputtering systems available.