Used VARIAN 3190 #9278288 for sale

VARIAN 3190
Manufacturer
VARIAN
Model
3190
ID: 9278288
Wafer Size: 6"
Sputtering system, 6".
VARIAN 3190 is a medium sized multi-target magnetron sputtering equipment designed for either single or multi-target applications. 3190 is a highly automated and reliable sputtering platform equipped with a range of innovative features to increase operational efficiency. The basic VARIAN 3190 system consists of an RF power supply, a DC power supply, a high-vacuum unit, and either a single or multi-target sputtering chamber. The RF power supply generates an AC power at a frequency of 13.56MHz with a maximum output power of up to 10kW. The DC power supply is capable of supplying up to 1.5kW with a maximum operating voltage of -50/-120V. The high-vacuum machine is equipped with a high-vacuum pump, a full range of detectors, and a high-flow vacuum tool. The sputtering chamber of 3190 is equipped with high-power radio-frequency (RF) shielding, which consists of a spherical vacuum chamber, an interior magnet, and field lines that ensure optimal energy transfer from the RF power source to the sputter targets. The targets themselves are mounted on a special backing target support, which prevents them from moving during sputtering. The backing target support also provides an easy way to change targets. VARIAN 3190 offers a range of features that make it an ideal asset for research, development, and production applications. The RF power supply offers programmable pulse-width modulation (PWM) for precise control of the sputtered deposition rate. The DC power supply allows for directional control of sputtered material, allowing for greater flexibility. The high-frequency RF source also produces feature sizes as small as 35 nanometers. The sputtering chamber of 3190 also offers a number of additional features. These include the ability to accurately control the target temperature and the ability to precisely control the argon gas pressure within the chamber. VARIAN 3190 also offers a range of safety features, including pressure interlock and a low-flow shut-off, for greater safety and reliability. 3190 sputtering model provides both flexibility and accuracy for sputter deposition applications. It features a reliable and high-performance equipment design that can be easily integrated into a range of research, development, and production applications. VARIAN 3190 is a reliable and cost-effective sputtering system that can be utilized in a range of scientific and industrial contexts.
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