Used VARIAN 3290 STQ #9262677 for sale

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Manufacturer
VARIAN
Model
3290 STQ
ID: 9262677
Wafer Size: 6"
Vintage: 2001
Sputtering system, 6" Quantum target 2001 vintage.
VARIAN 3290 STQ is a sputter deposition equipment capable of coating a wide variety of materials on a substrate. It is capable of producing a broad range of film types including conductors, resistance materials, insulators, dielectrics, oxides, nitrides, and alloys. It offers the ability to interface with specialty sputter sources such as argon ions and pulsed DC guns, opening the the possibility of magnetron sputtering. VARIAN 3290STQ is primarily a sputtering system that offers a variety of process technologies in a single platform. It offers the capability for conventional direct current (DC) sputtering, reactive sputtering in both fixed and alternating oxygen mixing, up to four-source configurations, and cusomizable reactive sputtering. By using these various techniques, it allows for high deposition rates at lower temperatures and with better uniformity. Additionally, 3290 STQ offers flexibility for customizing the deposition of materials, such as those requiring a particular crystalline structure. This unit features cleanliness and low contact contamination to enable the deposit layer to be of higher purity and produce a smoother, higher quality finish. This can be accomplished with its automated load lock 300mm and wafer transfer mechanisms as well as its automated chamber purges which reduce process-induced contamination. 3290STQ machine also provides exceptional precision for substrate position control with its manufacturer's patented mask collimation tool. This helps to provide a repeatable film thickness and uniformity that is accurate within a one thousandth of an inch. The asset's optics are sharp with interference filters to isolate the wavelength transmitted, and its design helps to reduce or eliminate defects. It provides increased reliability and repeatability due to the lack of traditional cross contamination of elements. In conclusion, VARIAN 3290 STQ is a highly advanced sputter deposition model that can accurately and consistently coat a wide variety of materials onto substrates. It is capable of producing a wide range of film types with unparalleled accuracy, and its advanced technologies allow it to provide a smooth finish, excellent uniformity, and precision. By taking advantage of its process control abilities, this equipment can help to increase productivity and reduce costs.
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