Used VARIAN 3290 #148077 for sale
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ID: 148077
Wafer Size: 6"
Vintage: 1998
Sputtering system, 6"
(3) Quantum targets
(1) Etch
NW3000 Control system:
Components
12.1" Touch monitor
NW3000 Software with Win7
Wafer process controller
Wafer loader controller
I/O Box
Cassette motor controller:
Components
Stepping motor & Sprocket
Motor Cable
1998 vintage.
VARIAN 3290 is a state-of-the-art sputtering equipment designed for producing high quality material deposition and analysis. It is a three-pocket system that allows for the deposits of two different materials into two separate pockets. The deposition process is controlled by a computer-controlled program created by VARIAN computer engineers, which allows for a very precise deposition of different materials onto different substrates. 3290 is capable of spinning and holding up to 500mm metal substrates, making it ideal for Research and Development (R&D) applications. The unit has a highly accurate pressure and vacuum controller that enables precise sputtering rates and substrate uniformity throughout the sputtering process. In addition, it is also equipped with a five-stage gas delivery machine to enable exact and reliable gas addition in a highly controlled environment. This enables deposition temperatures to be accurately monitored and controlled for superior performance. The three-pocket tool has several features designed to ensure the highest levels of material quality and homogeneity. The use of magnetron sputtering technology enables extremely accurate material deposition, be it for multi-layer layers that require strong adhesion, or for exact film thickness in different substrates. In addition, the asset is able to utilize three distinct gas environments, allowing for faster deposition rates, higher collimator efficiency, reduced sputtering power, and higher material purity. The integration of an advanced optical inspection model further allows VARIAN 3290 to ensure that the exact material thickness and distribution is achieved. An optional four-frame camera equipment is also available, which is ideal for measuring small details and identifying super thin material layers. With its multi-zone process control capability, the system is also capable of achieving fine pitch accuracy and excellent deposition uniformity. 3290 is engineered to be a reliable and durable unit that offers superior performance in every application. It is an easy to use and maintain machine, as it includes maintenance diagnostics and calibration tools, such as memory mapping, real-time monitoring, and accurate on-screen readings. The tool also comes with a comprehensive User Manual, which offers detailed instruction for the operators.
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