Used VARIAN 3290 #9075491 for sale

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Manufacturer
VARIAN
Model
3290
ID: 9075491
Vintage: 6"
Sputtering system, 6" (3) Target assemblies: Conmag II Station 1: Heated etch with AE RF-10 power supplies Station 2: Heater table with conmag II Station 3: Heater table with conmag II Station 4: Heater table with conmag II (4) Temperature controllers: EUROTHERM 818 Controller: FLUKE 1722A modified with flash drive and floppy drive Multimeter: AGILENT / HP / HEWLETT-PACKARD / KEYSIGHT 3438A Ferrofluidic transfer plate feedthru grade (3) Ferrofluidic shutter feedtrhu upgrades Ion gauge controller: VARIAN 880 Remote power supply panel, digital readout Etch matching unit controller with digital readout meters RF RWD & REFL Remote meter panel Cryo pump: CTI CT-8 with SC compressor Does not include dry scroll mechanical pump Power supplies: Target 1: inner 2.5kW, outer 12kW Target 2: inner 2.5kW, outer 12kW Target 3: inner 2.5kW, outer 12kW 1989 vintage.
VARIAN 3290 is a state-of-the-art equipment capable of providing high-precision sputtering processes on substrates up to 300mm in diameter. 3290 is the ultimate solution for research and production applications requiring precise control of the deposition process. It combines the advantages of high speed, excellent target utilization, simplicity of operation, flexibility, and evaporation capability. VARIAN 3290 system is fully automated, allowing for reliable deposition and repeatable results. It also offers a comprehensive range of substrates up to 300mm in diameter and is compatible with standard sputtering targets including oxides and metals. Its high-precision unit allows for finer control over the deposition process, giving users the ability to create complex multi-layer architectures with different materials and thicknesses. 3290 machine uses a magnetron sputtering process to deposit material coatings. The tool is designed with a single-filament cathode biased type sputtering gun, powered by an RF power supply. This gun utilizes a rotating magnetic field to control the arcs generated during sputtering and achieves high process efficiency. Using an RF bias voltage can enable higher rates of deposition to occur. The asset comes fully integrated with a gas inerting model which ensures clean and safe operation. It features an integrated high-vacuum chamber that controls air flow and purity, as well as an automatic pumpout option for guaranteed film quality. Additionally, a water recirculation equipment helps to maintain optimal temperature during processes, protecting against overheating and potentially damaging components. VARIAN 3290 features an intuitive control system which provides excellent process data readouts and process control. This includes manual and automatic deposition monitoring, as well as alarms and safeguards that help ensure user safety. Furthermore, the unit allows multiple film architectures to be produced simultaneously, while providing detailed information on each process. Overall, 3290 is a dependable way to produce exact, repeatable film deposition results. Its advanced capabilities have made it a popular option for research and production applications, with its high-precision control and flexible architecture options. It is the perfect solution for any sputtering process.
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