Used VARIAN 3290 #9121542 for sale

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Manufacturer
VARIAN
Model
3290
ID: 9121542
Wafer Size: 6"
Sputtering system, 6" (TiW, AlCu, AlCu, hard etch), 150mm, p/n 983-4353, 480V, 22A, 3ph, 60Hz, CTI-Cryogenics On-Board 8 cryopump V200-A turbopump; V200 turbopump (2ea) MKS 250B controller Fluke 1722A instrument controller Fluke 8840A multimeter Wide range thin film monitor SW Version 2.2 Sputtering power supply Vacuum system controller 880RS vacuum ionization gauge RF matching controller Cassette motor control Temp monitor Dual CTI-Cryogenics On-Board controller Pfeiffer DCU controller MKS vacuum controller Multi-range DC sputtering power supply (2ea) interlock status display (2ea) deposition source control RFPP RF10S RF generator (3ea) CPI CPW-12/480 power supply Includes OneAC power transformer/conditioner.
VARIAN 3290 sputtering equipment is a flexible, angular reactive sputtering tool that offers precision, reliability, and cost savings to manufacturers and research laboratories. This system is capable of sputter deposition on substrates of any material—such as glass, ceramic, plastic, and metals—in a variety of shapes and sizes. The unit offers optical quality results that can be used to control production yields and quality assurance. 3290 features a full line of custom sputtering platens including round, flat, conical, and multi-axis configurations to suit any process requirement. The machine also includes proprietary targets, like gold, which are specialized for use with specific substrates. VARIAN 3290 also offers robust process control. Its custom programmable controllers provide precision control over sputter depth, layer thickness, and uniformity. The integrated data collection tool enables process monitoring and allows for detailed reporting of the results. The asset is designed with advanced safety features, including a safety interlock model, power shutoff switch, and emergency stop. These features ensure safe operation and reduce the risk of hazards during workflow. The equipment is also user-friendly, making it suitable for laboratory and production environments alike. The user-friendly software provides custom recipes for complex sputtering process parameters, enabling operators to easily set and maintain process conditions. The system is also highly customizable and can be upgraded to provide wider coverage area, higher power density, and a number of other improvements to suit any production requirements. It is also compatible with most of the latest sputtering technology, such as our proprietary sputtering control unit, enabling precise process control. 3290 is a reliable and cost effective sputtering machine. It features superior process automation and advanced safety features, making it suitable for both research and production applications. With extensive customizability and state-of-the-art sputtering technology, this tool offers precise control over various sputter deposition parameters.
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