Used VARIAN 3290 #9139677 for sale

VARIAN 3290
Manufacturer
VARIAN
Model
3290
ID: 9139677
Wafer Size: 6"
Sputtering system, 6".
VARIAN 3290 sputtering equipment is a unique instrument used in the fabrication of metal and dielectric thin film deposition. It is specifically designed for the production of high quality metal or dielectric thin films and high temperature planar MOS devices. 3290 provides high throughput sputtering of metals and dielectrics from one to four Targets, with a power range up to 5kW. This system is capable of offering a wide range of sputtering backgrounds by providing in situ control of the bath parameters. The backbone of VARIAN 3290 is its integrated Vacuum Generation Unit, which provides an ultra-fast throughput of vacuum with an operating range down to 1 x 10-10 Torr. This machine also features a Multifaceted deposition chamber, which utilizes High Performance Magnetic Circular Ionization (HPMCI) to ensure the uniformity of the substrate. It is also powered by a low operating cost VARIAN DC Sputter Source, which reduces the energy consumption while maintaining high deposition times. In addition to its basic features, 3290 offers a wide range of optional pieces of equipment. This includes a range of Sensing Environments, which allow for the direct measurement of temperature, pressure and the electrical characteristics of the deposited material. This tool also has a Dynamic Film Measurement Asset, which allows for the precise control of the characterization of various materials during deposition. The model also features a highly advanced Server Equipment, which allows for the remote control of the entire sputtering process. It is capable of controlling up to 8 Targets at the same time, and provides automated data collection capabilities. It also has a sophisticated Vacuum Leak Detection feature, which allows for a fast and easy leak detection process. VARIAN 3290 is built for high durability and produces high-quality thin films with a maximum thickness of 2µm. It is supported by a range of customer service options, including on-site maintenance and validations. The system is capable of producing repeatable results without the need for frequent calibrations or modifications, making it an ideal choice for the production of high-performance materials.
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