Used VARIAN 3290 #9226265 for sale

VARIAN 3290
Manufacturer
VARIAN
Model
3290
ID: 9226265
Wafer Size: 5"
Vintage: 1989
Sputtering system, 5" 1989 vintage.
VARIAN 3290 is a dry, electrostatic, high-vacuum sputtering equipment designed to enable the deposition of thin-film coatings. The system offers three deposition techniques - direct current (DC), pulse-modulated direct current (PMDC), and radio-frequency (RF) - in a single, self-contained unit. The unit works by creating a plasma of the coating material and Ar gas inside the vacuum chamber, which is then accelerated towards the substrate. The coating material is typically an alloy - such as titanium, chromium, and aluminum -, though other metals and non-metals can be used. During sputtering, positively charged ions in the plasma bombard and erode the target material, with some of the emitted particles subsequently being integrated into a coating on the substrate. 3290 machine consists of a pumping unit, power supply, controller, multiple targets, RF tool, and temperature and vacuum monitoring equipment. It has two or four magnetrons depending on the application, each with a power rating of up to 100 watts. The magnetrons are coupled with the power supply to provide the necessary voltage and current for sputtering deposition. The controllers offer adjustable power levels, target selection, and substrate temperature control. The asset also features several safety features designed to prevent model malfunction. The voltage can be limited to a maximum of 5 kV, and the power is monitored at set intervals to prevent overheating. The equipment is also equipped with an automatic pressure release to allow safe operation in the case of excessive gas accumulation. VARIAN 3290 comes in multiple sizes to accommodate a variety of substrates up to 500mm in diameter and weighing up to 50 kg. It is also user-friendly and can be programmed to allow sputtering at certain times for extended runs. The portability of the system and its component parts makes it ideal for field applications. Overall, 3290 is a high-performance sputtering unit that is reliable and easy to use. It enables the filling-in or coating of a wide range of substrates with various materials, and its advanced safety features allows for reliable and safe operation.
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