Used VARIAN 3290 #9245003 for sale
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ID: 9245003
Wafer Size: 6"
Vintage: 1998
Sputtering system, 6"
Dual cassette loader
6000 Micron long lift heater
With digital heater controller
(3) Quantum sources per station
With (3) 12kW CPI power supplies, P/N: 04-716796-01
Cassette motor controller
Multi gauge controller
(2) MKS 250B Gas controllers
CTI On-board cryopump
CTI 8200 Compressor
(2) Process shields
Turbo load lock option
Chiller
(2) Metal cassette
RF-10S Generator and Etch option
VIPS Option
Target remove tool
Chamber wall shield remove tool
1988 vintage.
VARIAN 3290 is a state-of-the-art sputtering equipment designed by VARIAN Semiconductor. It is capable of producing high-quality materials for the microelectronics industry. 3290 is designed to deposit thin films of material on semiconductor wafers in a vacuum environment. It is equipped with single or dual sputtering sources, variable power supplies, ion etch source, and high-vacuum pumping system to provide a comprehensive vacuum process solution. VARIAN 3290 utilizes electron cyclotron resonance (ECR) to achieve high-rate uniform deposition of materials. The ECR method allows for a greater control over the rate, thickness and uniformity of the deposited material for better performance. The unit also offers dry and wet processes, with the wet processes comprising of several plasma etchings to create high resolution layers on materials. 3290 has several features for safety and convenience, including a built-in hardware monitoring machine, vacuum gauge ports, and adjustable height platforms. Additionally, VARIAN 3290 includes an automated process control tool that can be used to identify and troubleshoot process-related issues in real-time. Operators can also customize process parameters for each job, such as rate, deposition time, and deposition thickness, to ensure the best results possible. 3290 is a reliable and cost-efficient sputtering asset that offers unparalleled control over the rate and uniformity of the deposited material. It has several features for safety and convenience, and its highly automated process control model makes it easy to troubleshoot any process-related issues. VARIAN 3290 is designed for high-quality deposition on semiconductor wafers to produce higher yields and improved performance in the microelectronics industry.
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