Used VARIAN 3290 #9255392 for sale

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VARIAN 3290
Sold
Manufacturer
VARIAN
Model
3290
ID: 9255392
Wafer Size: 6"
Sputtering system, 6" Particle reduction CTI-8F Cryo pump Utility box Gen1 Power supply: 12 kW (3) TEL / TOKYO ELECTRON TP Guns RF Bias Compressor DC Bias with heater EUROTHERM Heater controller No VIPS.
VARIAN 3290 is a sputtering equipment primarily used for the production of microelectronics. It is a compact, integrated system capable of performing various processes such as deposition of tantalum nitride, silicon dioxide, copper, and low temperature poly-silicon, as well as etching processes such as positive and negative RIE (Reactive Ion Etching). 3290 has several advantages over other sputtering systems such as its small, compact size and large vacuum chamber. It is designed to run on a range of substrates from simple 2" x 2" up to the size of a 6" wafer. The features of VARIAN 3290 gives it a versatile capability to perform various sputtering tasks. It has the ability to adjust the speed of the sputtering process to match the size and complexity of the substrate that is being deposited. It also has a variety of different sputtering targets available, allowing for different deposition materials and etching processes. There is a choice of DC or RF (Radio Frequency) power supplies that can operate according to the sputtering type. These power supplies can also be programmed to adjust the voltage ranging from 0-5 kV for RF and 0-3kV for DC, enabling precise control over the sputtering process. 3290 comes equipped with comprehensive signal controls for the process. It has several digital displays such as the pressure read-out, temperature and voltage level indications, the magnetic pressure information, and the chamber temperature. The unit also features a built in linear encoder that monitors the linear motion of the sputtering targets. It can also be connected to a Personal Computer for data acquisition and programming. Overall, VARIAN 3290 is an efficient machine for sputter coatings. It is an ergonomic tool designed to take up much less space compared to other sputtering systems. Its range of adjustable parameters can be used to create consistent and high quality sputter coatings. In addition, 3290 is suitable for low temperature, miniaturized electronics, and the development of advanced micro-systems. With its accurate stepper motor control and easy operation, VARIAN 3290 is an ideal compact sputtering asset for research and production work.
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