Used VARIAN 3290 #9257985 for sale

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VARIAN 3290
Sold
Manufacturer
VARIAN
Model
3290
ID: 9257985
Wafer Size: 6"
Sputtering system, 6" With quantum target.
VARIAN 3290 is a high-throughput sputtering equipment designed for both rapid and precise deposition of thin films on the surface of a range of substrates. This deposition process offers a variety of advantages, including high rates of metal deposition, improved adhesion of the metallic layer and improved electrical and optical properties of parts. 3290 uses the magnetron sputtering technique to deposit nanoscopic layers of material on the substrate. The system is capable of processing substrates up to 200mm square and a variety of materials including stainless steel, aluminum, tungsten, titanium, copper, chromium, cobalt, nickel and gold. VARIAN 3290 has a vacuum chamber that operates in the range of 1 to 6E-3 Torr, allowing for straightforward deposition processes with minimal contamination. RF and DC magnetron sputtering is available and can be controlled via a touch screen interface. The sputtering gun consists of cylindrical magnets, which produce a high-density, uniform plasma inside the chamber. The substrate is held in the chamber by a rotating table; the deposition rate is controlled by adjusting the rotation speed and the magnetic field produced by the magnets. A noble gas such as argon can be used to assist the process at a rate between 5 and 120 sccm. 3290 uses either a mechanical pump or a cryopump to maintain the vacuum in the chamber. The unit also features automated programmable control, allowing for repeatably accurate processes each time. The process can be monitored via an image monitor and automated manipulators with an auto-tilt capacity. VARIAN 3290 provides precise layer thickness control with a minimum of 10 Angstrom of accuracy. Furthermore, uniform and stoichiometric deposition of up to 10 layers with each run is achievable. The machine is essentially a complete process solution for thin film deposition, providing reliable, repeatable results each time.
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