Used VARIAN 3290 #9273814 for sale
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ID: 9273814
Sputtering system, 6"
With PC
(3) Process modules
AC Rack
Compressor
Particle reduction option
Water pump option
CTI 8F Cryo pump
Utility box
Power supply type: 12kW (Gen1)
RF Bias option
DC Bias with heater
EUROTHERM Heater controller
FLUKE 1722, 1722A / KESA Controller
Controllers:
FLUKE 1722A with floppy diskette
Wafer Load Controller (WLC)
Wafer Process Controller (WPC)
ARGON MKS-250B Controller
Wafer Heater Controller (WHC)
EUROTHERM Heater controller
Thin film monitor
Thermocouple gauge control
Interlock and interface chassis
Vacuum system control
Ion gauge control
Cryo temperature monitor
Power distribution chassis
Low voltage power supply
Master interconnect
RF Etch monitor
Phase mag discriminator
Electrical utility box
Mechanical utility box
Wafer handler utility box
DC Power supplies: 12kW
RF Generator IKW: RFPP RF-10
Bias option heater block
Mechanical pump
CTI Cryo pump and compressor
Coaxial feedthrouh type
HI-Vac valve
Source power meter
Cassette motor controller
RF Matching controller
Wafer handler assy
No loadlock turbo control
No VIPS turbo controller
Metal cassette missing.
VARIAN 3290 is a sputtering equipment that has been designed and developed by VARIAN Corporation. This state-of-the-art system allows for precise control of thin-film deposition process. It offers excellent precision in material deposition and superior control of cleaning processes. 3290 unit is a three-part unit. The materials source module is where materials such as metals, alloys, and oxides are fed into the machine at predetermined rates. Once materials are fed into the material source, the process takes place within the heated chamber, where the substrate is placed. The third part, the power supply module, provides an adjustable RF signal which creates an interaction between the substrate and the material and ultimately forms the thin-film of the desired material onto the substrate. The tool provides a high degree of control over the deposition process, this includes multiple frequencies of operation, temperature control, and adjustable flow rates. This high degree of control and precision is achieved through innovative power supply technology, precise magnetic field metrics, and the Pulsed Plasma-Enhanced sputter technology. Additionally, the asset is built with an intuitive and user-friendly interface which allows for control over the model's setup parameters as well as its monitoring of the parameters in real-time. The equipment is equipped with a number of different safety features such as an in-system safety stop button as well as an automated over-pressure protection unit. The safety features are designed to ensure the safe operation of the machine while also ensuring the integrity of the affected materials. This ensures the quality of materials being deposited. The tool is one of the most reliable and advanced sputtering asset available on the market. It is also one of the most user-friendly systems, making it easy to learn and subsequently utilize in different use cases. VARIAN 3290 is suitable for many different thin-film deposition and utilization applications, providing the highest quality optical coatings, films, and more for a wide range of industries. This model will bring any laboratory closer to advanced thin-film deposition and will create a greater competitive advantage.
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