Used VARIAN 3290 #9398805 for sale

VARIAN 3290 sputtering equipment is a versatile, high-performance deposition system that is designed for a wide range of physical vapor deposition (PVD) applications. The unit offers precise control of deposition rates and process parameters, fast deposition rates and accurate uniformity across large samples, as well as robust and reliable operation. 3290 is a modular PVD machine, with a variety of add-on modules and components to support specific applications or processes. The tool includes a high-power sputter gun, a RF or DC power supply, the capability to monitor the process parameters, and a integrated storage chamber with up to four working chambers. The chambers can be equipped to run traditional sputtering deposition, multi-target sputtering and dual-target deposition, reactive sputtering, and a wide variety of additional configurations as process requirements change. To ensure superior uniformity, the asset offers Automatic Uniformity Compensation (AUC) to provide uniformity across the substrate. The model also features high-precision temperature control, with process temperatures from room temperature to over 1000°C, as well as temperature tacking capabilities for optical and conformal film layers. VARIAN 3290 is designed for operation up to 10 Torr at vacuum levels of 1x10-7 Torr, with a pumping speed of up to 30 liters per second, and complies with the latest RoHS standards for materials compatibility. The equipment is powered by a combination of a digital Stepper Motor (DMS), a Linear Motor (LM), and an open-loop Analog Motor (AM) to provide fast and accurate motion control. For maximum safety, 3290 includes advanced safety features such as an integrated safety interlock system, external emergency stop functions, and an embedded controller. The controller provides easy and repeatable setup of the unit, as well as the ability to adjust the sputtering parameters and deposition parameters as needed. VARIAN 3290 is a versatile and reliable PVD machine that can be used to create a variety of layered materials, including metals, alloys, oxides, and dielectrics. The tool is ideal for applications in areas such as microelectronics, optoelectronics, aerospace and defense, automotive, and industrial uses. The asset is designed for easy maintenance and can be upgraded for higher performance and enhanced process control capabilities.