Used VARIAN 3290ST #293628007 for sale
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ID: 293628007
Wafer Size: 6"
Sputtering system, 6"
Quantum targets
VIPS Etch station
CTI Cryopump, 8"
9600 Compressor
Datatrak control system.
VARIAN 3290ST is a robust, high-performance sputtering equipment designed for the deposition of high-quality thin films onto substrates. It utilizes an innovative dual magnetron principle to create a uniform and highly controllable deposition process. This allows the deposition of a variety of different materials, including conductive, insulating, and magnetic, onto substrates of different shapes, sizes, and compositions. VARIAN 3290 ST is composed of a chamber and a vacuum-controlled deposition head. The chamber is hermetically sealed and includes a low-impedance magnetron along with two sets of triode electrodes. To maintain its vacuum level, a turbomolecular pump is included. The magnetron provides a uniform sputtering field and allows for controllable rates of deposition. It also has an adjustable process gas control system to ensure the optimal environment for optimal film quality. The deposition head is composed of two sets of coils, which create a magnetic field. The first set of coils is used to apply a plasma power pulse to the substrate, while the second set is used to generate a uniform sputtering field. The sputtering field is capable of producing uniform energy distribution over the substrate surface, resulting in a high deposition rate and well-defined film quality. This unit is designed to work with both vacuum and atmospheric pressure processes. Its process gas control machine allows for the adjustment of different gas flow rates, as well as the pressure, ratio, bias voltage, and temperature. 3290ST is also equipped with an advanced control tool that ensures optimal process control and repeatability. 3290 ST is a reliable and cost-effective sputtering asset that is ideal for creating high-quality thin films. Its advanced design offers enhanced film quality and process control, as well as a long service life. With its high performance, it is ideal for applications in the automotive, aerospace, optical, and semiconductor industries.
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