Used VARIAN M2I #293813097 for sale

VARIAN M2I
Manufacturer
VARIAN
Model
M2I
ID: 293813097
Sputtering systems.
VARIAN M2I is a high-end, multi-axis sputter deposition equipment manufactured by VARIAN Systems, Inc. The system is designed to deliver high-quality sputtered coatings on a variety of substrates including metals, semiconductors, plastics, and ceramics. VARIAN M 2 I unit utilizes an indirect DC-magnetron/arc-target configuration, in a three-axis, robotic platform. This configuration ensures optimal process sophistication and advanced coatings sputter deposition capabilities. The machine features a closed tool sputter deposition chamber with an eight-inch substrate stage, 5-13 armed robotic arm, 3 dual-tip, robotic sputter guns, and eight indigital process controllers. The robotic arm allows the asset to sputter both complex and large area substrates, while maintaining consistent layer thickness and quality. Additionally, the instrument has a pressure control model with a range of +/-3 mTorr, and a gas input/output subsystem that provides a rapid pulsed or continuous gas flow. M2I's digital PLC unit features advanced in-process control algorithms, enabling the equipment to include both reactive sputter deposition and pure, passive sputter deposition. Additionally, the instrument has an integrated, three-chamber vacuum subsystem, which helps to ensure a high degree of cleanliness and low background gas pressure during the deposition process. This subsystem can also be utilized for recipes requiring multiple materials. M 2 I provides a broad range of additional features to further optimize and streamline the deposition process. These include a programmable target heater that can be used to warm the target up to the desired sputtering temperature, and a real-time, process monitor which displays the various sputter parameters in real time. VARIAN M2I is an advanced, multi-axis sputter deposition system designed to deliver high-quality sputtered coatings on a wide range of substrates, including metals, semiconductors, plastics, and ceramics. The unit features an eight-inch substrate stage, 5-13 armed robotic arm, three dual-tip, robotic sputter guns, and a pressure control machine. Additionally, the instrument has a digital PLC unit with advanced in-process control algorithms, and a three-chamber vacuum subsystem that ensures optimal cleanliness and low background gas pressure. Finally, VARIAN M 2 I has a programmable target heater and real-time process monitoring to further enhance process sophistication and coatings sputter deposition capabilities.
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