Used VARIAN / NOVELLUS M2i #9133229 for sale

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VARIAN / NOVELLUS M2i
Sold
ID: 9133229
Sputtering system, 8" 1995 vintage.
VARIAN / NOVELLUS M2i is a state-of-the-art sputtering equipment ideal for advanced deposition applications in the semiconductor manufacturing industry. VARIAN M2i provides precise, reliable performance for the highest conductivity, electromigration, and lifetime requirements for the most demanding products. NOVELLUS M2i has a unique aluminizing process that produces low-resistance structures to enable more advanced device designs and minimize power consumption. M2i's patented, high-rate sputter deposition module is a vital component of the system, delivering unparalleled throughput. By controlling the proportion of reactants, users can precisely turn on/off certain reaction processes to create ultra-thin conductive films. The unit also takes advantage of VARIAN MBX CenterStage™, an automated command and control machine that supports accurate scheduling and processes oversight. The CenterStage™ makes it possible to detect substrate misalignment, sputter deposition rate, target characteristics, and other parameters in real time to minimize any yield losses, and increase throughput. VARIAN / NOVELLUS M2i also offers reliable data recovery capabilities that protect against power interruption or failure through seamless self-diagnosis and recovery. Furthermore, VARIAN M2i sputtering tool has a self-cleaning feature which keeps the chamber clean and free from contaminants. This helps improve the quality of the end-use product and yields better performance in the long run. NOVELLUS M2i sputtering tool is an excellent choice for semiconductor manufacturers looking for an advanced, reliable, and fast deposition asset that can meet their stringent requirements for conductivity, electromigration, and power consumption. Its unique aluminizing process, fast deposition rate, and automated command and control model make it an ideal sputtering tool for advanced deposition applications.
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