Used VARIAN / NOVELLUS M2i #9146577 for sale

VARIAN / NOVELLUS M2i sputtering equipment is one of the most versatile deposition tools available. It is a multi-technology platform with fully automated in situ monitoring and control capability. VARIAN M2i is fitted with two or four planar cathodes and is capable of delivering up to 100 watts at 25 MHz and 1000 watts at 250 MHz. It is suitable for a wide range of materials, including metals, alloys, oxides, and chalcogenides. NOVELLUS M2i is a multi-technique tool featuring both RF and DC magnetron sputtering, as well as reactive ion etching (RIE) and advanced substrate rotation. These techniques can be used in a variety of combinations and processes to enable the deposition of advanced, complex materials. The system also features a high-power and high-speed MESA DC sputter source, which is integrated into the same vacuum chamber. This integrated platform allows for the simultaneous sputtering of different materials from different sources, as well as the rapid switching between sputter sources. The advanced control and monitoring systems used with M2i sputtering unit can be fully automated to ensure that the desired properties are achieved. This is further enhanced through the in situ monitoring capabilities which allow the real-time measurement of thickness, composition and electrical properties. Furthermore, VARIAN / NOVELLUS M2i includes a patented multi-parameter control feature which allows simultaneous monitoring of multiple sputter sources, allowing for superior process management and optimization. VARIAN M2i also includes a number of additional features which make it an ideal tool for advanced research. These include: a reactive chamber for etching, an in-situ surface diagnostics machine, a large sample chamber with wide temperature range, and a number of other capabilities that enable the customized deposition of advanced materials. With its integrated systems for both materials deposition and automated control, NOVELLUS M2i provides a solution for the deposition of complex materials with precision.