Used VARIAN / NOVELLUS M2i #9213819 for sale

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VARIAN / NOVELLUS M2i
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ID: 9213819
Sputtering systems.
VARIAN / NOVELLUS M2i is a sputtering equipment designed for atmospheric pressure physical vapor deposition (PVD) processes. It is a versatile, compact system that utilizes a broad variety of sputtering targets and deposition sources to produce thin films in a wide range of applications. The unit's components are designed to maximize deposition throughput, yield, and process consistency. It features two target banks and a dual magnetron sputtering machine, allowing for simultaneous and sequential sputter deposition. The tool is designed for flexibility in material deposition, with a wide variety of target materials and sputtering modes available. The asset's power source is capable of providing 25+ kW of power to the sputtering targets, allowing for excellent process control. The integrated controller has adjustable chamber pressure for improved sputter deposition. The patented dual magnetron sputtering model enables operation in Ion Assisted Deposition (IAD) and a wide range of cathodic sputtering modes. The equipment also features automated film control and process monitoring. This ensures that processes are optimized for minimal defects and process deviations. Amongst other features is a turbo pump and recirculating coolant system which prevents contamination of the chamber. VARIAN M2i is an ideal solution for high deposition rate applications. Processes can be quickly and accurately implemented and the integrated heating element allows for low temperature film deposition. It is a high-end unit, offering the best in PVD technological solutions.
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