Used VARIAN Power rack for 3190 & 3180 #9237471 for sale
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ID: 9237471
VARIAN Power rack for 3190 & 3180 is an advanced sputtering equipment used in the thin film technology used for the production of compound semiconductors. It is an essential part of the production process as it ensures efficient, accurate and stable deposition rates while eliminating variability caused by particle contamination. The Power Rack is designed to minimize operating costs and maintenance requirements by utilizing a hybrid load lock chamber which allows high-quality ultra-thin film deposition to be completed at a much faster rate than with traditional systems. This allows for faster production rates, and increased overall efficiency. The Power Rack features a centrally located, precision controlled power supply that accepts manual adjustment of voltages up to 1KV for each sputtering chamber. In addition, the 3190 & 3180 can be tightly controlled by a computerized system that allows for programmable set points for each parameter and timer-based control of target power levels. The module includes an operator friendly graphical user interface with monitoring and operation of the chamber parameter to provide uniform and precise sputtering of materials, deliver accurate thicknesses, and eliminate particle contamination. The intuitive graphical user interface also enables the user to control the horizontal and vertical position of source rotation to increase the uniformity of the films. The Power Rack has four cathodes that can be individually operated to target specific ions in the sputtering process. The Source-2F,4Fand8F systems allow the operation to select different combinations of ion sources depending on the requirements of the job at hand. The 8F unit provides a wide range of sputtering pressure that can be adjusted using the graphical user interface. For enhanced convenience, the machine is equipped with a computer to monitor and operate the tool from the computer terminal. The full setup also includes optional sputter gun and sputter power supply racks for increased flexibility and control in sputtering operations. All components are highly reliable and assembled with the highest quality standards. Power rack for 3190 & 3180 is a state-of-the-art sputtering asset designed to simplify the thin film deposition process while reducing downtime and expense related to maintenance activities. Its intuitive user interface enables precise parameter monitoring and control, efficient ionization of target materials, and optimized film uniformity that results in a higher quality finished product.
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