Used VARIAN / TEL / TOKYO ELECTRON MB2-730 #9083530 for sale

VARIAN / TEL / TOKYO ELECTRON MB2-730
ID: 9083530
Vintage: 2000
CVD system 2000 vintage.
VARIAN / TEL / TOKYO ELECTRON MB2-730 is a compact and powerful sputtering equipment ideal for thin film deposition. The system is fully automated with a sputter source, substrate and target assembly, and aseptic cathode transfer device. The sputters source assembly features an enhanced evapotron magnetic sputter source and is capable of both DC and RF magnetic sputtering. The target and substrate assembly includes a linear translation stage, loaded with either a round or rectangular sputter target, as well as a rotatable substrate holder that allows for easy loading and unloading of substrates. The aseptic cathode transfer device is designed to ensure clean and repeatable substrate transfers over a wide range of temperatures and includes an ion source and an electrostatic shutter to prevent unwanted particulate contamination. TEL MB2-730 can reach operating pressures as low as 10 millitorr and can accommodate substrates up to 24" in diameter. It also features a temperature-controlled substrate holder to maintain a steady substrate temperature, as well as an argon backfill and shutter for added safety. The unit is designed for ease of use and reliability and has been optimized to deliver uniform deposition of a variety of films, including metals, dielectrics, conductors, and semiconductors. VARIAN MB2-730 is a powerful and versatile sputtering machine ideal for thin film deposition applications.
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