Used VARIAN / TEL / TOKYO ELECTRON MB2-730 #9100777 for sale
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ID: 9100777
Wafer Size: 8"
Vintage: 1997
WSIX CVD System, 8"
(3) Chamber (L/R/C) System
DCS-WSIX Process specification
(2) Chambers
(2) Loadlocks
(2) Cassettes
(2) MKS Baratron
Water pressure: 5 kg fc m2
Water flow: 33 litre / min
Water temperature: 15-25° C
General exhaust volume: 3.2 m3 / min
With touch panel display
Monitor
Keyboard
Mouse
Turbo pump and dry pump
Gas: WF6 5 SCCM, DCS 500 SCCM, (2) Ar 200 SCCM, Ar 100 SCCM, ClF3 500 SCCM
Power supply: AC 208 V, 150 Hz, 3 Phase, 100 kVA
1997 vintage.
VARIAN / TEL / TOKYO ELECTRON MB2-730 is a sputtering equipment designed for the reliable deposition of thin films and coatings. This system utilizes an integrated Operating Panel (OP) that allows for easy setting adjustment, convenient data acquisition and recipe development. TEL MB2-730 features a unique Magnetron-Quad configuration, which enables the unit to create four sputtering arcs from a single source, allowing for quick and efficient thin film deposition. Each sputtering arc is used to deposit a different material, and the machine is capable of performing multiple layers of deposition at once. The electromagnetic coils can be precisely adjusted to control the precise degree of applied ionization. VARIAN MB2-730's chamber is hermetically sealed with air-purging and device cooling technologies. This ensures that contaminant levels are kept to a minimum and that a low substrate temperature can be maintained during deposition. As a result, the quality of the thin films we produced with this tool are exceptionally high. The sources inside TOKYO ELECTRON MB2-730 include magnetron sputtering sources, ion sources and electron gun sources. All sources are mounted on a rotatable stage for easy access, and each source has adjustable power levels for precise control of the film deposition rate. Additionally, MB2-730 is also equipped with a quartz monitor that can detect the presence of silica salts in the chamber. VARIAN / TEL / TOKYO ELECTRON MB2-730 also comes with a variety of safety features to protect the equipment and the user. There is an emergency STOP switch, as well as the gas isolation asset, RF shielding and water-circulated heat exchanger. The model is also equipped with an interlock equipment that will shut down the system when an emergency occurs. Overall, TEL MB2-730 is a powerful sputtering unit for producing reliable and high-quality thin films and coatings. Its Magnetron-Quad configuration and adjustable power levels allow for precise control, and the integrated Operating Panel and powerful safety features guarantee user safety and the intactness of the equipment.
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