Used VARIAN / TEL / TOKYO ELECTRON MB2-830 #67592 for sale

VARIAN / TEL / TOKYO ELECTRON MB2-830
ID: 67592
Wafer Size: 6"
sputter, 6".
VARIAN / TEL / TOKYO ELECTRON MB2-830 is a sputtering equipment designed for applications in thin-film research and production. This versatile system is designed for both large and small parts. It utilizes magnetron sputtering, which allows for higher deposition rates, efficiency and uniformity of thin-films than other deposition methods. It is based on the MB platform from TEL and features high thermal protection, long life and fast turnover time. TEL MB2-830 has an extensive collection of configurable components to create the most suitable sputtering unit for users' applications. These components include substrates and susceptors, magnetrons positional assemblies, planar coils and inert gas atmosphere. The components come in various sizes and shapes to enable efficient sputtering of large parts. The machine runs through a power supply and controller, using an oscillating frequency of 1 to 50 kHz and configurable sputter gas flow capabilities. The power levels are adjustable between 20 to 500 W. Its cooling apertures are hermetically sealed, preventing any contamination during sputtering operations. For uniform thin-film deposition, VARIAN MB2-830 features a multi-spatial uniformity monitoring tool. This asset uses position sensors and photocell detectors to enable accurate uniformity measurements. It also has a transverse scan capability for rotating large samples, allowing for larger fields of uniformity. MB2-830 can be operated in a range of vacuum modes from sub-low pressure, low pressure, medium to high pressure. Its operating temperatures range from room temperature to 800°C with heating capability. In addition, the model complies with Class I or Class II environment requirements. To ensure optimal cycling performance, TOKYO ELECTRON MB2-830 is equipped with advanced in-line cleaning systems and Intelligent Gas Monitoring Equipment. These systems offer continuous, safe and consistent cleaning of components, as well as accurate gas monitoring levels. Overall, the robust and versatile VARIAN / TEL / TOKYO ELECTRON MB2-830 sputtering system provides convenient, reliable and efficient means of sputtering operations. It provides extensive configurable components and a number of advanced features to guarantee the highest quality thin-film deposition. Furthermore, it ensures the utmost safety and compliance with applicable industrial regulations.
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