Used VEECO Spector #9115806 for sale

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Manufacturer
VEECO
Model
Spector
ID: 9115806
Ion beam deposition system Currently de-installed.
VEECO / DEKTAK Spector is a sputtering equipment designed to deposit thin films. It is used for applications in the fields of semiconductors, microelectronics, data storage media, medical technology, optics, electronics, and thin film research. VEECO Spector is a PVD (Physical Vapor Deposition) system. It operates in a vacuum chamber and is equipped with two sputter sources. It combines the features of two types of machines, a vertical sputtering unit and a planar sputtering machine. Both planar and vertical sources can be used to deposit different materials. DEKTAK Spector also uses a multi-target modular design which enables deposition of a large variety of materials and a wide range of targets for deposition. Spector offers a wide range of configurations and can be expanded to include multiple target holders and sample holders. It can deposit multiple thin films in any sequence and with multiple material targets all in one run. The tool has a large (43.3 inch) working area and can deposit up to 11" wafers or substrates. The temperature of the chamber is maintained at 25 to 40°C. It is equipped with an eight channel source cooling asset for better control of the process. Using VEECO / DEKTAK Spector, users can deposit a variety of materials, such as metals, alloys, composites, oxides, dielectrics, and metals with an oxide overlay. The capacity of the model is high and provides excellent deposition rates and uniformity. It is also well suited for high speed production for thin film applications. VEECO Spector is designed with process control in mind and automates complex deposition tasks to ensure uniformity and repeatability of thin film deposition even at high operational speeds. The equipment-wide user interface software allows the engineer or technician to control all parameters, view process data, and generate reports. Its Database Copier feature helps keep setup information intact over long runs and jobs, with easy access to multiple substrate and target information. DEKTAK Spector is an efficient way to deposit high quality thin films with precision and uniformity. It is capable of handling large wafers and substrates, making it perfect for large scale thin film productions. With its wide range of capabilities and system-wide automation, Spector is the ideal tool for achieving precision thin film deposition in a variety of industries.
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