Used VEECO INSTRUMENTS VCE.PVDI C-2 #9209412 for sale
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ID: 9209412
PVD Sputtering system
With metal film
P/N: VCE.PVDI C-2
System Includes:
Computer controls w/ NEXUS Tool controller
Vacuum pumps:
AA10V1
EDWARDS IGX100N
(2) DIVAC 1.4 HV3
(2) Compressors: CIT 9600
Electrical cabinet
Component cabinets w/ (2) VAT Adaptive pressure controllers
Vacuum control: TPS 601
(2) APC UPS 450
(2) Rack mount computers w/ DVD, CD drive
Power supplies
KEPCO Power supply
(2) ADVANCED ENERGY Pinnacle Power supplies
(2) ENI Model OEM-1250: RF Generators.
VEECO INSTRUMENTS VCE.PVDI C-2 sputtering equipment is a reliable, cost-effective system developed to enable coating of substrates with thin films for a wide range of applications. The unit utilizes a DC-power supply and provides direct current (DC) with adjustable voltage and current settings for optimal deposition rates. This machine supports both single and dual-sided sputtering with the help of two magnetron sputter sources located on the lower and upper portions of the tool in order to coat both the top and bottom of the substrate. The substrate is held in place by electrostatic clamps for accurate placement and uniform deposition. It also features an automatic turret which enables easy access for easy substrate change without interrupting the sputter process. The asset provides multiple process and recipe control options such as substrate bias, fixed power, and current and voltage feedback functions for precise control over the film structure and thickness. It has a wide range of sputter gas settings which support various deposition types such as oxides, nitrides, metals, and dielectrics. It also offers additional safety features such as a built-in interlock model, pressure control unit, and emergency shutoff. The VCE.PVDI C-2 can accept substrates up to 150 mm in size, and is suitable for low pressure of up to 70 mTorr. The custom vacuum chamber is designed to yield superior deposition conditions, and can achieve a pressure of 1×10-6 torr after a single pump cycle. Lastly, the equipment's efficient chillers enable efficient cooling of the deposition chamber and sources. Overall, VEECO INSTRUMENTS VCE.PVDI C-2 is a reliable, cost-effective sputtering system designed to enable the coating of substrates with thin films for a wide range of applications. It offers advanced control options and process settings, as well as exceptional pressure and vacuum capabilities, making it an ideal choice for coating small substrates at high throughput.
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