Used VEECO Spector HBDG #293645262 for sale
URL successfully copied!
Tap to zoom
ID: 293645262
Vintage: 1996
Dual ion beam deposition system
Ion beam deposition system
Horizontal beam, dual gun (HBDG)
IBAD Processing
R&D Size
Dry roughing pump for enhanced UV optical film performance
RF Ion sources with PB neutralizers
Standard vacuum instrumentation via ITAVS
Split drum style chamber
(4) Round targets
External substrate rotation
CTI Cryotorr 10IIRC pump
IC4+
(2) Ion 6cm guns
Plasma bridge neutralizers
5" targets
(4) Position water cooled target carousel with gas flood
Substrate stage: 6"
Water cooled
Rotation
90-0-90 tilt
Currently warehoused
1996 vintage.
VEECO Spector HBDG is a high-powered sputtering system designed to create high-quality thin films with precise control over film thickness, deposition rate and uniformity. The system consists of a base chamber, a target chamber, high voltage power supplies and vacuum pumps. The base chamber is a vacuum chamber with a rectangular shape for mounting three magnetron sputtering sources. The sputtering sources are connected to an able high voltage power supply, allowing precise control of the voltages. The targets are mounted in the target chamber, which contains insulating walls and a cooled internal shelf to keep the targets at a low temperature. The pressure in both chambers is maintained by connecting the chambers to two vacuum pumps that can be adjusted to any desired pressure. At the start of the sputtering process, the chamber is evacuated to a low pressure and the targets are heated until their temperature reaches the required level. The targets are then exposed to a strong electric field, created by the high voltage power supply, causing electrons to be emitted. As the electrons reach the surface of the target, they cause the atoms of the target material to eject, forming an ionized plasma. The plasma is then accelerated by being exposed to a high voltage, creating a beam of ions that travel towards the substrate. The sputter deposition process is carefully monitored with the help of spectrometers and other detectors. This allows the process to be adjusted to optimize the quality of the thin films and improve the uniformity of their thickness. Spector HBDG is ideal for creating thin films of high quality and uniformity. It is used in a variety of applications including solar cells, thin film transistors, MEMS devices, and display technologies.
There are no reviews yet