Used VEECO Spector HBDG #9236498 for sale

VEECO Spector HBDG is an advanced and cutting edge sputtering equipment that consists of four different modules. It is a high-performance sputtering system designed to create low-defect nanomaterials and devices. The four modules of Spector HBDG combine to offer superior etching performance to accommodate a wide range of materials and processes. The core of VEECO Spector HBDG is the high-density, high-throughput (HD/HT) module, which is capable of both co-sputtering and ion milling. This module contains two dual-magnet sputtering chambers, two high-speed power supplies, and a single dual beam ion source, enabling sputtered films with up to 100 layers in a single run. The HD/HT module also allows for sequential sputtering, which can be used to deposit complex, multilayer structures in a single, efficient process. The second module is the low-vacuum spectrum (LV/SP) module, which utilizes a high-vacuum dual-magnetron sputtering chamber. This module is optimized for very thin-film sputtering and is particularly useful for sputtering specialty films such as hafnium oxides and tantalum nitrides. The LV/SP module also features an improved optical window, which allows for greater throughput and improved sputtering accuracy. The third module is the Low Stress Sputtering (LSST) module. This module is designed for the deposition of layers with low stress and high abrasion-resistance. The high-energy LSST module utilizes a unique double-stacked target unit in order to increase total ion flux and reduce particle surface contamination. The fourth and final module is the rapid thermal annealing (RTA) module. This module is capable of simultaneous heat-treatment and sputtering, providing a two-in-one process that dramatically shortens the total processing time. The RTA module utilizes high-frequency generators to achieve high-temperatures in a short amount of time, and its patented triple-anode design ensures that layer uniformity and adhesion are maintained. In summary, Spector HBDG is an advanced and precise sputtering machine that utilizes four unique modules to enable the efficient fabrication of low-defect nanomaterials and devices. The tool is capable of multi-layer processing, low-stress sputtering, and rapid thermal annealing to improve material properties and reduce processing times.