Used VEECO Spector #9394865 for sale
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VEECO / DEKTAK Spector is a sputtering equipment developed by VEECO, a renowned company specializing in precision metrology. This system is used in the fabrication of various microelectronic chip devices and is supplied with a variety of sputter tools that are tailored to the customer's operational needs. VEECO Spector unit comes with a robust metal base to ensure precise and repeatable performance. It is rated for an operation range of 10 millitorr to higher than one atmosphere and operates at 100 Watts, offering a wide range of process capabilities. This machine provides the highest level of process control and reliability. The tool is exclusively designed for thin film deposition and features a primary vacuum chamber with one or two independent sputtering heads. It has a wide platform with separate chambers for sample movement, pre-sputtering, post-sputtering and post-process. This asset also includes the option for temperature control during pre-sputtering. The model provides an application-oriented sputtering operation along with accurate target placement. The sputter target is placed in the holder and can be easily moved from one position to another with minimal effort. This platform is designed for repeatable sputter performance with tight deposition control and can be used for a variety of processes including stacking multiple layers to create a multilayer film or for non-standard substrates, such as large-area tools or high-aspect ratio structures. DEKTAK Spector is designed with productivity in mind. It has a modularized design, allowing components to be easily changed out or added to the equipment. This system also includes a fast-pumping primary vacuum chamber for fast and efficient exhausting of the chamber. Additionally, the sputter head has a unique rotatable and tiltable design to ensure the target's uniformity when depositing low-resistance films. Finally, Spector is fully automated. It includes built-in parametric programming, automatic adjustment functions and alarm notification functions to alert the user for any potential issues during the process. This user-friendly unit has revolutionized the chip fabrication industry and is widely utilized by companies around the world.
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