Used AMAT / APPLIED MATERIALS Mesa #9295107 for sale
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ID: 9295107
Wafer Size: 8"
CMP Cleaner, 8"
Main power box, 12"
Lower electronic:
Mega
System
(2) Brushes
SRD
Mega LDM
Brush module:
Brush bath
Brush OP / Cis Cylinder
Sensor type
Motors
Brush LDM Direct type:
Valves
LDM Box and slide
SRD Module:
SRD Bath
Motor
Megasonic generator
Mega heater
Fan filter unit
Walking beam
Cover door pin and Interlock switch
Other sensors:
Wafer present sensor
Level sensor
Leak sensor
OP Sensor
CLS Sensor
Air fitting:
Lower electronic air tubing assy fitting
Check air fitting
Cables:
Walking beam lower electric cable
Brush lower electric cable
SRD Lower electric cable.
AMAT / APPLIED MATERIALS Mesa equipment is a wafer grinding, lapping and polishing system. It offers high precision, high throughput handling of wafer grinding, lapping and polishing process operations and provides the highest level of accuracy and repeatability. The unit is configurable to perform multiple grinding, lapping, polishing and post etch cleaning operations in a single pass. It is ideal for processing different types of semiconductor and photovoltaic wafers in a variety of formats. AMAT Mesa machine uses a multi-stage magnetic gimbaling table on a precision-engineering aluminum frame. This ensures that each table is accurately calibrated, allowing for a consistent and reliable grind, lapping and polishing process. The tool has a low profile design that permits maximum use of the table to handle a wide range of wafer sizes. APPLIED MATERIALS Mesa asset also features easy to use controllers that enable precise setting of the grinding, lapping and polishing parameters. Mesa model also features numerous safety features for enhanced operator safety. These features include a standard video camera for operator monitoring, a signal vision so the operator can monitor the process from an off-site location and a signal alert if an unsafe condition is detected. This equipment also has a capability to limit the speed of the table, as well as limit the torque transfer when the lapping and polishing operations are in progress. This ensures the material is handled safely and securely. AMAT / APPLIED MATERIALS Mesa system runs on specialized software known as Z-CT063 which enables preset operation parameters and allows for custom recipes of parameters. This ensures that each operation is performed consistently and accurately. Other advanced features available on AMAT Mesa unit pertain to process monitoring, including the reverse cleaning capability that helps to reduce the amount of cleaning that needs to be done as part of the process. Overall, APPLIED MATERIALS Mesa is an ideal solution for wafer grinding, lapping and polishing operations. Its modern design, easy to use controls and numerous safety features, make it a superior choice for the semiconductor and photovoltaic industries.
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