Used AMAT / APPLIED MATERIALS Mirra 3400 #9277696 for sale
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ID: 9277696
Vintage: 2000
CMP System
FABS Cassette system
Mirra polisher
Ontrack cleaner
Missing parts:
(3) Slip rings
Platen 3 lower skin
PC3 End effector
2000 vintage.
AMAT / APPLIED MATERIALS Mirra 3400 is a wafer grinding, lapping, and polishing equipment designed for advanced semiconductor device fabrication. The system is designed to provide manufacturers with a high-throughput, efficient and reliable solution for precision wafer grinding, lapping, and polishing. The unit supports both synchronous and asynchronous multiple spindle configurations and utilizes a variety of abrasives and polishing pads. AMAT Mirra 3400 has a modular architecture, with each module being optimized for specific applications. The main modules of the machine include a spindle, belt, pump, and wafer chuck assembly. The spindle has multiple high torque direct drive motors, allowing for precise adjustments and control over the grinding, lapping, and polishing processes. The belt tool is designed to reduce vibration and flexure to ensure consistent results, regardless of the material. The pump asset provides coolant and abrasives to the tool head, while the wafer chuck assembly maintains an even distribution of heat and pressure to the wafer. APPLIED MATERIALS Mirra 3400 also features high-performance automation through its integrated PC-based production control. This integrated PC allows control of the model's hardware and software, including adjustments to the process parameters, monitoring of the equipment's status, and production data collection. It also integrates with a variety of third-party systems and controls, providing further customization options. The system's high-precision servo motors provide excellent particle control and dynamic process while the fully programmable process recipes ensure instant start-up and improved run times. In addition, Mirra 3400 features a compact, ergonomic design and robust construction to ensure easy maintenance and reliability for long-term repeated use. Overall, AMAT / APPLIED MATERIALS Mirra 3400 is a highly customizable and efficient wafer grinding, lapping, and polishing unit designed to meet the highest standards of modern device fabrication. It offers users advanced automation, programmable recipes, and a highly reliable platform to ensure continuous performance, yielding superior results every time.
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