Used AMAT / APPLIED MATERIALS Mirra Mesa #293771203 for sale
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ID: 293771203
Wafer Size: 6"
Vintage: 2011
Chemical Mechanical Polish (CMP) system, 6"
Equipped with integrated NOVA Measurement system
Process: Oxide
Wafer shape: Flat
Factory interface:
Cleaner type: Mesa
Megasonics
WET Robot
Nova 2040 In-line metrology system
Interface: SECS / GEM
Controller CPU Type: 5201
25-Slot cassette
Platen and head options:
Polishing head: (4) Profiler heads, 6"
Consumable retaining ring
Pad wafer loss sensor: Dual sensors with light light pipe
Platen temperature control
Slurry delivery options:
Slurry delivery: (3) Slurries
No slurry flow monitor
EMO Guard ring
No smoke detector
Circuit breaker: 200 A
Wide type GFI: 30 mA
Spray gun
PC
Mouse
Power supply: 200-230 V, 50/60 Hz
2011 vintage.
AMAT / APPLIED MATERIALS / AKT Mirra Mesa is a wafer grinding, lapping, and polishing equipment. It is ideal for surface enhancement of single, as well as multiple crystalline semiconductor substrates including Silicon (Si), Silicon Carbide (SiC) and Gallium Nitride (GaN). It is built with dual-head spindles, which makes it capable of both single-sided and dual-sided applications. It features tracking and auto-correction capabilities which means that it can adjust the spindles' output in order to ensure a consistent finish across the whole wafer. The system is designed with a high powered air-bearing spindle so that it can maintain consistent and reliable lapping, grinding, and polishing tasks without vibrations. Moreover, it has a built-in vision unit that allows it to maintain a secure and consistent tooling position. AKT Mirra Mesa also has a unique power conversion machine that helps maintain maximum torque while reducing the heat in the motor. This helps prevent damage to parts and helps increase productivity. The tool also features an Easy-Lift abrasive slurry supply asset. This model helps reduce the amount of time needed to change out a polishing plate, allowing the equipment to run more efficiently. On top of all this, AMAT Mirra Mesa includes an online monitoring and control feature that includes pressure/depth, temperature, and illumination. This allows operators to make sure that the system is working optimally, increasing the unit's lifespan and accuracy. APPLIED MATERIALS Mirra Mesa is designed with high-end features that make it ideal for high-yield and high-volume production. It is suitable for a range of applications including back grinding, lapping, slicing, dicing, and polishing. It is also designed with safety features in mind such as a high-security cover, operator interlock machine, and automatic shut-off to help ensure safe and secure operation. Mirra Mesa also comes with a range of accessories including abrasives, cassettes, and diamond rollers that make it convenient for all sorts of applications. Furthermore, it is user-friendly, easy to install and operate, making it ideal for use in a range of production environments. With AMAT / APPLIED MATERIALS / AKT Mirra Mesa, AKT gives customers a reliable and efficient solution for achieving the desired surface finish.
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