Used AMAT / APPLIED MATERIALS Mirra Mesa #9077553 for sale
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ID: 9077553
CMP system, 8"
Cross Assembly:
Absolute Encoder Harmonic Drive
(4) NSK Megatorque spindle assemblies with fuse blowing fix
(4) Vexta 5-phase head sweep motors
(4) Cu Titan polishing heads
(3) Platen system with Alpha low-noise gearboxes, Yaskawa motors w/ NEC compliant cables
(3) AMAT DDF3 pad conditioners
Cu Slurry delivery system
AMAT Copper Rinse / Slurry delivery arms
Leak proof polisher skins
Closed loop monitoring features
Fluid reduction package
Input voltage: 200-240 VAC 50/60 Hz
Integrated Mesa cleaner:
Wafer sense transfer station
Single wafer machined (leak proof) Megasonic tank
Vertical spin rinse dry station
Flow monitoring on all cleaner chemical and DI flows (On/off)
Edge grip automation
Side feed facilities and exhaust
Mesa power supplied by Mirra controller
Line of sight top cover between Mesa and Mirra
Digital ISRM monitor integrated into the polisher (all 3 platens) with:
Full face HW/SW capability and dual optical ISRM / iSCAN ISRM in platen 1
Missing parts.
AMAT / APPLIED MATERIALS / AKT Mirra Mesa is a wafer grinding, lapping, and polishing equipment designed for high-precision semiconductor device fabrication and process development. The system features a variety of tools for precise wafer surface finishing and is equipped with an integrated process control unit for real-time process monitoring. The machine also offers advanced features such as automated wafer loading/unloading, automated process sequence control, and integrated electrical testing. AKT Mirra Mesa tool is capable of grinding, lapping and polishing wafers up to 200mm in size. It also offers a variety of process recipes including electrosynthesis, defect removal, surface planarization, single-sided and double-sided polishing, and more. The asset is capable of controlling and monitoring process parameters such as pressure, speed, and temperature in order to ensure precise results. It is equipped with an automated wafer handling model with built-in safety features and an automated rotary wafer table. AMAT Mirra Mesa equipment also features a high-precision vision system with advanced image processing, vision assisted pattern recognition, and metrology tools for precise wafer surface evaluation. This unit provides complete control over the accuracy and repeatability of the whole process. It is also capable of controlling the rate of feed and pressure of the rinsing process. The machine is equipped with advanced software and safety features to ensure the safety of the operator and the tool during the operation. It also features advanced process control and monitoring functions including real-time process data collection. The asset is compliant with various safety standards, such as CE, UL, and CSA. The model is also backed by AKT commitment to providing customers with outstanding technical support and services. In summary, Mirra Mesa is a high-precision wafer grinding, lapping, and polishing equipment designed to meet the performance requirements of the semiconductor industry. It offers a variety of tools for precise surface finishing, along with an integrated process control system and advanced vision systems. It is compliant with various safety standards and provides customers with outstanding technical support and services.
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