Used AMAT / APPLIED MATERIALS Mirra Mesa #9104952 for sale
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ID: 9104952
Wafer Size: 8"
Vintage: 2001
CMP system, 8"
System: Dry in / Dry out
Process: Cu
Software
Polisher MB60a1
Cleaner CB22p2
Endpoint IB11h7
CPU Pentium III 400MHz
Dual RAID HardDisk Yes
HardDisk Size 68GB
RAM 128MB
Hardware
Polisher /with Controller Mirra 3400 / 5200
Cleaner Mesa
Indexer Rorze FABS SMIF
# FOUP Install: (3)
Metrology None
Slurry(P1+P2+P3) ABCD Each
Endpoint Laser P1 iScan
Endpoint Laser P2 FullScan
Endpoint Laser P3 None
Polisher Middle Skins Opaque
Pad Conditioner type Universal
Platen Coating Teflon
UPA Standard
Chiller No
Com Port Server Digi EL160
Cleaner Brush LDM Direct Feed LDM with entegris flow sensors
Walking Beam PEEK Fingers with PP Grippers
Slurry in CLC Yes
Slurry Arm 4line
Polishing Head Titan I
Rotary Union 4-port
Cross type Cattrack
UPA 3 Port
Megasonics yes
SRD Yes
Brush 1 yes
Brush 2 yes
PM reduction kit
blackout covers
Splash guard
Exhaust blower
Magnehelic Pressure Low Level detection kit
SRD Exhaust Interlock
2001 vintage.
AMAT / APPLIED MATERIALS / AKT Mirra Mesa is a state-of-the-art wafer grinding, lapping, and polishing equipment designed to produce optimum performance in a range of wafer applications. The system is comprised of a high-precision optical grinder that accurately grinds uneven surface stones. It features a dual-axis motor control unit, which provides precise and repeatable grinding movements. The machine is also equipped with an ultra-violet curing machine that provides a closed-loop response tool. It is designed to quickly and accurately lap and polish wafers to a completely flat surface. An adjustable power supply allows for tailored results, while a vacuum-protected electronic asset prevents foreign material from entering the main work area. AKT Mirra Mesa ensures excellent surface finish and accuracy on both flat and contoured wafers. It features a specialized spindle design that contributes to a precise surface finish. The built-in coolant model further reduces the risk of thermal damage to the wafer, producing high-quality results. Additionally, the machine's dual-axis motor control equipment is designed to minimize vibration, resulting in increased tool life. Overall, AMAT Mirra Mesa Wafer Grinding, Lapping, and Polishing System offers precision and performance. Its advanced cooling technology ensures consistent product accuracy. The built-in vacuum protection unit minimizes the risk of contamination. The machine's dual-axis motor control tool further reduces vibration and tool wear. As a result, it accurately produces both flat and contoured wafers with an ideal surface finish.
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