Used AMAT / APPLIED MATERIALS Mirra Mesa #9232538 for sale
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ID: 9232538
Wafer Size: 8"
Vintage: 1999
CMP System, 8"
Technology: CMP STI
Platform type: Mirra Mesa
Wafer shape: Flat
Application information:
Application: Oxide
System: Dry in / Dry out
Device type: D-RAM
Device geometry: 0.09 Microns
Process materials:
Polish slurry: STI
Platen 1, 2 & 3 pad: IC1010
Pad conditioner: Diaphragm
Pad conditioner head: DDF3
Pad conditioner holder
Interface options:
Cleaner type: MESA (Converted from Reflexion)
Megasonics
Robot type: AMAT / APPLIED MATERIALS
In situ removal rate monitor: Digital
SECS GEM Interface
Cassette tank
Cassette type: SMIF Type
Installation type: Through the wall
Integrated system basic FABS: FABS 212
Platen and head options:
Polishing head: (4) TITAN I Heads
(4) Retaining rings
Pad wafer loss sensor
Platen surface: Teflon coated
Slurry delivery options:
Slurry delivery: (2) Slurries by peristaltic pump
Slurry flow rate: STD Flow
Slurry flow monitor
Slurry containment bulkhead: Single containment
No slurry loop line
Slurry dispense arm: Extended rinse arm
No slurry leak detector
DI Water
High pressure rinse
Mirra type
Cleaner type: Mesa (Converted from Reflexion)
Fabs type: SMIF Type
Safety equipment:
Red turn to release EMO button: STD
EMO Guard ring
System labels: English
Smoke detector
Umbilicals:
Polisher to controller cable: 30 Ft
Controller to monitor cable: 30 Ft
Factory hookup:
Standard upper exhaust
Upper exhaust connection: 8"
Drain manifold: 4 Line to Fac
Drain adapter: NPT Fitting
No castors for Mirra system
Weight distribution plate (Skid pad)
User interface:
Gray area: Monitor
Cleanroom: Monitor
Class cart for monitor
No class cart for (2) monitors
No class 100 cart for (2) monitors
Stainless cart
Mouse / Trackball: PC Mouse
No hard disk backup
Polisher / Fabs light tower:
Tower mounting type: (4) Lights
Polisher tower: (4) Colors
UPA Water fall
Inter platen clean type with splash guard
Polisher tower colors sequence: RYGB
Cleaner option: Mesa cleaner
Maintenance options:
Single spray gun
No lapping stone
Special options:
No nylon brush
E-Chain teflon sheet: Water fall
No low pressure release water
Spares parts:
Heads
Retaining ring
(2) Pad conditioner heads
Mesa:
Direct chem type:
Megasonic module
Brush 1
Brush 2
Standard:
SRD
Output station
Electrical requirements:
Line frequency: 50/60 Hz
Line voltage: 200~230V
Delta connection
Power lamp: Green
No power connected lamp
Circuit breaker: 200A
AC Outlet box: 100V
No configurable I/O
Wide type GFI: 50mA
1999 vintage.
AMAT / APPLIED MATERIALS / AKT Mirra Mesa is a wafer grinding, lapping & polishing equipment developed to help manufacturers meet the ever-increasing demand for high-performance, low-cost devices. The machine provides precise and repeatable results for a variety of surface finishing applications. The workpiece is loaded onto the manufacturing platform along with a pinned abrasive wheel, diamond pad, or polishing pad, which are then spun at speeds up to 12,000 rpm depending on the application. The spindles are then pulled and pressed across the surface of the workpiece, gradually grinding away surface material. This technique allows the user to control the amount of material removal, ensuring a uniform surface finish throughout the process for improved product consistency. AKT Mirra Mesa is designed with a digital control system and includes a variety of measurement and feedback mechanisms to monitor and adjust the grinding and polishing process as needed. The unit also includes an integrated optical machine, which ensures the workpieces are being processed according to predetermined parameters and confirms a consistent finish and surface integrity after each step. The tool features a built-in filtration asset that prevents dust and debris from passing into the model's internal components, maintaining optimal performance and cleanliness. Additionally, AMAT Mirra Mesa operates at a wide range of temperatures and can be adapted for all types of workpiece materials. APPLIED MATERIALS Mirra Mesa is an ideal solution for manufacturers seeking high-precision processes for surface finishing. Its integrated digital control and monitoring systems, adjustable pressure and temperature settings, and dust-free filtration systems ensure consistent and repeatable results that are essential for producing quality products.
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