Used AMAT / APPLIED MATERIALS Mirra Mesa #9254128 for sale
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ID: 9254128
Wafer Size: 8"
Vintage: 2003
CMP System, 8"
Technology: CMP Oxide
Wafer shape: Flat / Notch
Consumed process materials:
Polish slurry
Platen 1 pad: IC1010
Platen 2 pad: IC1010
Platen 3 pad: IC1010
Pad conditioner: Diaphragm
Pad conditioner head: DDF3
Pad conditioner holder
Factory interface options:
Cleaner type: MESA (Converted from reflexion)
Megasonics
Robot type: AMAT / APPLIED MATERIALS
In-situ removal rate monitor: Full scan
SECS GEM Interface
Cassette tank
Cassette type: SMIF
Open cassette
Integrated system basic: FABS 212
FABS Robot blade: Ceramic
Cassette type: 25 Slots teflon PFA
Platen and head options:
Polishing head: (4) TITAN I Heads
(4) Retaining rings
Pad wafer loss sensor
Slurry delivery options:
Slurry delivery: Peristaltic pump
Slurry flow rate
Slurry flow monitor
Slurry loop line
Slurry loop line A
Slurry loop line B
Slurry dispense arm
DI Water
High pressure rinse
Safety equipment:
Red turn to release EMO button
EMO Guard ring
Smoke detector
Polisher slurry leak sensor
Mesa brush leak sensor
Umbilicals:
Polisher to controller cable: 50 Ft
Controller to monitor cable: 50 Ft
Factory hookup:
Upper exhaust
Upper exhaust material: SS
Exhaust vent interlock: Upper and lower
Upper exhaust connection: 8"
Drain manifold:(4) Lines to FAC
Drain adapter: NPT Fitting
DIW Inlet assy: W/O CDA Regulator
User interface:
Monitor selection: LCD Monitor
Monitor 1 location: LCD Monitor on cart
Class 1 cart for monitor 1
Mouse
Start stop button: Controller
Light tower selection: Controller and FABs
Polisher light tower:
Controller tower mounting type: Horizon flush mounted
Controller tower
Controller tower lamp type: Incandescent
Light tower:
Tower mounting type: Pole mounted
Tower lamp type: Incandescent
Tower colors sequence
Cleaner options:
Mesa cleaner
Walking beam assemble
Megasonic module: Delivery tank
Megasonic delivery type: Pressurized
Chemical A
Chemical B
Scrubber module:
Scrubber delivery type: Direct feed
Brush chemical
Scrubber 1 delivery type: Direct feed
Brush 2 chemical
Brush 1, 2 spray bar
SRD Module:
SRD Shield
SRD Exhaust and drain lines: Single
Upper electronic box: UEB
Signal tower
Pad conditioner head: DDF3
Pad con disk holder
Polishing head: TITAN 1 Head
Upper Pneumatic assy: UPA
Slurry delivery: (2) Slurry line for each platens (6 Slurry line)
Endpoint system full scan ISRM (P1, P2)
No slurry containment bulkhead
No slurry loop line C
No Uninterruptible Power Supply (UPS)
No delta connection
No power connected lamp
No AC outlet box
No isolation transformer for Mesa
No elbow fitting for drain pan
No castors
No weight distribution plate
No internal vacuum ventury
No SRD heater lamp
Power requirements:
Line voltage: 200~230 V
Line frequency: 50/60 Hz
Delta connection
Power lamp
Circuit breaker: 200 A
Configurable IO: 10 Channels
GFI Type: 30 mA
2003 vintage.
AMAT / APPLIED MATERIALS / AKT Mirra Mesa is a high precision computer-controlled wafer grinding, lapping and polishing equipment. It is designed for use in the semiconductor industry for the precise grinding, lapping and polishing of complex wafers. The system utilizes precise motion control and advanced feature sets to achieve exceptionally precise geometries, specifically for the semiconductor market. The unit includes a programmable rotary platen, which allows for the precise polar and azimuthal control of rotational motion. This motion is used in combination with brushing, grinding and polishing techniques to produce precise surface geometries. The motion is controlled and monitored via a series of rotary encoders, providing precise and repeatable performance. The machine also features a sophisticated heating and cooling tool, designed to ensure the optimal temperature range for the processes being performed, helping to reduce wear and tear on the parts. The asset is engineered to perform grinding, lapping and polishing applications with very tight tolerances (> 0.02 μm). All parts and materials form the model, including the aluminum baseplate, bearing carriers and shafts, are all designed and built to exacting tolerances and specs. The equipment is NSF approved and designed to meet all applicable HEPA Filter Standards. Additionally, AKT Mirra Mesa provides advanced software control, allowing for precise and repeatable operation. The system supports both on-board and off-board computers for operation, monitoring and diagnostics. It also includes a range of tooling options, allowing for a wide range of applications. Overall, AMAT Mirra Mesa is a cutting-edge unit designed to deliver precise and repeatable grinding, lapping and polishing applications, especially in the semiconductor industry. Its advanced feature set yields top-notch, quality results that are sure to exceed customer expectations.
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