Used AMAT / APPLIED MATERIALS Mirra Mesa #9275384 for sale

ID: 9275384
CMP System.
AMAT / APPLIED MATERIALS / AKT Mirra Mesa wafer grinding, lapping and polishing equipment is an automated platform designed to effectively process semiconductor wafers. This system boasts a throughput of up to 200 wafers/hour and is capable of grinding, lapping, and polishing with a single package configuration. The advanced control unit allows for process monitoring and statistical process control (SPC) capabilities across multiple platforms, while utilizing advanced robot control software to provide optimal control and accuracy over the process. AKT Mirra Mesa is equipped with a variety of components to ensure accurate wafer processing. This includes a high speed wafer chuck, robust robot arm, grind head, and multi-axis bed. The bed features three dimensional movement and is designed to maintain a stable substrate position throughout the process. The robot arm helps to further optimize the process, by providing tension control, speed adjustment, and vibration damping. The grind head is designed to optimize the wafer topography using a fixed radius and is fitted with carbide blades to help ensure accuracy and prevent damage to the wafer surface due to excess friction. In addition, AMAT Mirra Mesa offers process control capabilities that are unique to this machine. This includes the ability to program specific lapping times, speeds, grit sizes, and other parameters. It is also equipped with a wafer rotation mechanism to ensure that the best surface finish is achieved with maximum uniformity. The control tool also allows users to store recipes from which processing parameters can be derived for optimal process repeatability. The asset ensures a high quality and reliable finish on each wafer. This includes a high degree of dimensional accuracy, as well as surface finish. It is also capable of producing a superior planar finish prior to the deposition of metals, oxides, and other thin films. Mirra Mesa is ideal for use in the semiconductor industry as well as for research and development applications.
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