Used AMAT / APPLIED MATERIALS Mirra Ontrak #9275382 for sale

ID: 9275382
CMP Systems.
AMAT / APPLIED MATERIALS Mirra Ontrak is a wafer grinding, lapping & polishing equipment used for the precise machining of semiconductor and optical components from small to large wafer-scale. The machining process uses diamond plated laps, polishing heads and slurries to provide precise, repeatable performance. AMAT Mirra Ontrak is jointly developed technoogy by Applied Material and Mirra. It utilizes the patented Mirra DryClean Technology to keep the process environment dry and clean. The technology eliminates the need of slab sawing and chemical etching chemicals and also optional slurry cleaning at the end of process step. The system features fully enclosed operation which ensures a dust-free environment along with highly automated parameters which allows high throughput processing across multiple wafer sizes ranging from 4" to 200mm. It can also be used to process sapphire, quartz and other hard materials. The advanced control unit used in the machine allows for precise automated parameter settings with multi-axis motion control over grind quality, polish parameters, feed rate and wafer leveling. This makes it easy to select the best process cycles for specific applications with precise adjustment for each process step. APPLIED MATERIALS Mirra Ontrak is equipped with high-precision servo motor drives and multi-axis controls, allowing for uniform finish, smooth surfaces and near-perfect repeatability in part to part operations. The machine has a 6-station indexer, integrated wafer press and wafer chucking machine. This allows for full integration with other process equipment, making it ideal for full-flow processing from thinning to polishing. The machine is equipped with an intuitive touchscreen user-interface with robust visualization tools that allow complex grind cycles and processes to be set and controlled with ease. Additionally, the integrated surface analysis tool provides detailed analysis regarding surface microstructures and quality. Overall, Mirra Ontrak is a sophisticated automated machining asset for precise grinding, lapping and polishing of semiconductor and optical components from small to large wafer-scale. With its integrated control model and advanced automation, it ensures repeatable performance and high-precision machining. The equipment is an ideal choice for full-flow processing from thinning to polishing.
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