Used AMAT / APPLIED MATERIALS Reflexion 3600 #293625723 for sale
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ID: 293625723
Wafer Size: 12"
Vintage: 2005
CMP System, 12"
Wafer shape: Notch
(3) Load ports, 8"
Dry in/dry out system
Clear type skin
MESA Cleaner type
Operator interface: FI Load port 4
Heater lamp
Polisher options:
Profiler head
4-Port Upper Pneumatics Assembly (UPA)
Dark pad sensor
KAWASAKI Wet robot
(2) Slurries pump type
Slurry dispense arm: Fixed
Platen configuration (1, 2, 3):
Platen type: PFA Coater platen
Platen pad: IC 1010
Platen pad conditioner: Screw-type disc
Cleaner options:
MEGASONIC Tank
Type: Pressurized
Scrubber module for 1 and 2:
Brush type: Texwipe PVA
Delivery type: Pressurized low flow
Upper E84 Senor and cable
KAWASAKI Single arm track robot
Standard load port: Operator interface
Load port: (25) Enhanced wafers FOUP
Facilities options:
Line voltage: 200-300 V
Line frequency: 50/60 Hz
GFCI: 30 mA
2005 vintage.
AMAT / APPLIED MATERIALS Reflexion 3600 is a state of the art wafer grinding, lapping, and polishing system. This machine is designed to be used for the processing of delicate materials such as semiconductor wafers, MEMS components, and nano-scale devices with extreme accuracy. Its design also allows for precise control of process parameters for optimum performance. AMAT Reflexion 3600 utilizes hydroplaning technology to enable a high-quality surface finish and uniformity on wafers and other hard materials. The hydroplane platform allows for continuous contact between the work piece and the grinding, lapping, and polishing pads. This helps to minimize surface discoloration and decrease processing time. The machine includes a rotational workholder with auto-stop functionality. This enables users to accurately control the amount of material removed or introduced into the process as needed. The workholder also comes with a built in back-side air system. This helps to reduce deformation and vibration, resulting in accurate, repeatable process results. APPLIED MATERIALS Reflexion 3600 is designed to have a rapid process cycle time of less than 10 minutes per wafer, enabling users to quickly achieve the desired result. The machine also includes an easy to use, intuitive user interface that helps make set up and operation simple. Reflexion 3600 also features a multi-axis motion platform for precise backside grinding and lapping. It also includes a front side environmental enclosure designed to protect the system from processtunable contamination. In addition, the machine comes standard with an array of sensors and safety features. This includes multi-axis collision detection, anti-skid safety features, and vibration protection. Overall, AMAT / APPLIED MATERIALS Reflexion 3600 is a powerful, reliable, and accurate machine designed to help users achieve the highest level of process precision for delicate materials. Its sophisticated design enables users to quickly and efficiently achieve their desired outcomes.
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