Used AMAT / APPLIED MATERIALS Reflexion 3600 #9223700 for sale
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ID: 9223700
Wafer Size: 12"
Vintage: 2003
CMP System, 12"
(4) SMIF Systems
KENSINGTON Handler system
JDS UNIPHASE Argon laser, 75 mW
Chuck edgegrip
2003 vintage.
AMAT / APPLIED MATERIALS Reflexion 3600 is an advanced wafer grinding, lapping, and polishing equipment designed for R&D and semiconductor manufacturing. This system utilizes a unique polishing approach that enables production of very precise and uniform results. The unit includes a pressure-controlled polishing head with cantilever suspension, surrounded by an intelligent measurement machine to provide feedback on the polishing process. AMAT Reflexion 3600 is composed of a paten-pending polishing head and a modular platen, which can be adjusted to accommodate different wafer sizes. The polishing head includes a cantilever suspension tool, which is activated by an automatic pressure transducer, allowing for precise and uniform polishing regardless of wafer thickness. The patented modular platen enables precise specification of the polishing surface for the wafer. It is also adjustable to accommodate different wafer sizes, from large die to small-sized substrates. In addition, the asset features an automatic pressure control sensor that can read and respond to any change of contact-pressure during polishing. This allows for adaptive adjustment of process parameters for a variety of wafer types, such as GaAs, Si, SiC, and GaN. It also features adjustable polishing speeds and a feedback model that controls the platen speed to maintain a uniform result. Furthermore, APPLIED MATERIALS Reflexion 3600 has an advanced robotic loading equipment. This allows for automated loading, transfer of parts, and process monitoring. This system also has built-in diagnostics, helping the user detect and troubleshoot unit problems. For the highest polish quality standards, Reflexion 3600 includes an unique imaging machine that captures high-resolution images of the substrate both before and after polishing. This allows for direct comparison and process improvement. It also stores these results in a secure database to ensure that the data is securely transmitted to other departments and personnel. Overall, AMAT / APPLIED MATERIALS Reflexion 3600 is a powerful, precise, and efficient wafer grinding, lapping, and polishing tool, designed to work in a variety of SEMI standard substrates. Its features make it a great choice for R&D and semiconductor manufacturing applications.
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