Used AMAT / APPLIED MATERIALS Reflexion 3600 #9223702 for sale
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ID: 9223702
Wafer Size: 12"
Vintage: 2003
CMP System, 12"
(4) SMIF Systems
KENSINGTON Handler system
JDS UNIPHASE Argon laser, 75 mW
Chuck edgegrip
2003 vintage.
AMAT / APPLIED MATERIALS Reflexion 3600 is a state-of-the-art wafer grinding, lapping and polishing equipment designed to produce optically flat and smooth surfaces on a variety of substrates. Its patented process utilizes a specially designed diamond grinding/lapping stone to grind and lap the wafer's surface to the desired roughness. The wafer grinding is followed by a multi-ring polishing process to achieve the desired optical quality. AMAT Reflexion 3600 consists of a compact, yet feature rich vacuum chamber equipped with the latest robotic and automation technology. This allows for a higher throughput and flexibility to accommodate differing products, substrates, and sizes. It comes with single-wafer input and output technology as well as automated loading and unloading of up to 18 different substrates. The polishing step of the process is done using diamond-reinforced pulleys that drive the wafer against a precision-hydraulic jig. This ensures optimal uniformity and control over the polishing process. Additionally, the system also incorporates a Closed-Loop Automated Pressure Control (CLAPC) module that monitors the pressure applied to the wafer during the polishing process, allowing for precise control over the results. The sophisticated process controller of APPLIED MATERIALS Reflexion 3600 provides full automation of the operation and has an easy-to-use graphical interface. This makes it simple to store and recall recipes, set policies, detect abnormalities and fine-tune process parameters. Additionally, it offers real-time monitoring of the grinding and polishing process, as well as a suite of process diagnostics and error codes that allow the operator to evaluate the effectiveness of the process on any batch. Reflexion 3600 is also designed to ensure a safe and clean environment, as it is fully enclosed and uses a containment bagging unit to keep the chamber and its components clean and particle-free. Additionally, the machine includes a robust vacuum tool to remove any contaminant particles in the air. Overall, AMAT / APPLIED MATERIALS Reflexion 3600 is an efficient and reliable asset for grinding and polishing wafers with the utmost precision. Its precise process control, automated functionality, and robust safety features make it perfect for a variety of applications.
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