Used AMAT / APPLIED MATERIALS Reflexion 3600 #9223735 for sale
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ID: 9223735
Wafer Size: 12"
Vintage: 2002
CMP System, 12"
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2002 vintage.
AMAT / APPLIED MATERIALS Reflexion 3600 is a wafer grinding, lapping, and polishing equipment for processing semiconductor wafers. AMAT Reflexion 3600 is designed for optimal throughput, flexibility, and precision. It features a compact, open-frame footprint design that provides users with maximum accessibility while allowing for integration with automated handling systems. APPLIED MATERIALS Reflexion 3600 has a rugged and reliable magnetic levitation linear motor that provides high-precision positioning and movement, resulting in wafer positioning accuracy and repeatability of better than 10μm. It also has two independently-controlled grinding/polishing heads to accommodate wafers up to 200mm in diameter, with a maximum speed of 300rpm. Reflexion 3600 also includes a vacuum-assisted 'tug' system and a programmable cross-head that allows for quick loading and unloading with Z-axis height control. The unit also features three-dimensional positioning of the wafer spindle and mounting hardware and progressive process power curves for optimum result in a variety of processing conditions. AMAT / APPLIED MATERIALS Reflexion 3600 is engineered for a safe and user-friendly operation. It features a control machine that can be adjusted via an LCD touch-screen display, with a wide range of parameters, such as RPM, torque, shift-up/down, wafer cleaning, vacuum levels, and automatic separation available. The tool also has an intuitive user interface, designed to be highly user-friendly and intuitive, allowing operators to quickly and accurately program and execute processes. AMAT Reflexion 3600 is the perfect choice for semiconductor fabrication and other applications that require precise grinding and polishing processes. Its highly-accurate positioning and repeatability, combined with automated processes and user-friendly control, make APPLIED MATERIALS Reflexion 3600 a reliable solution for achieving ideal results.
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