Used AMAT / APPLIED MATERIALS Reflexion LK Copper #293802361 for sale

AMAT / APPLIED MATERIALS Reflexion LK Copper
ID: 293802361
CMP Systems.
AMAT (APPLIED MATERIALS) Reflexion LK Cupper is a full-cycle equipment for wafer grinding, lapping and polishing, designed for use in the production of compound semiconductor materials such as 3D conventional and 3D integrated circuits. The system includes an array of components essential for producing such complex structures, which are essential for a large variety of industry needs. First, the LK Copper features an automated wafer grinder, capable of precisely grinding both edges and surfaces of a range of wafer sizes, from 150 mm down to 100 mm and below. The wafer grinder is equipped with features that minimize contamination and reduce thermal exposure, allowing for high process repeatability and reliability, and making it well-suited for finishing complex structures. Next, the LK Copper unit's lapping station is a high-quality polishing solution designed for best-in-class performance. Equipped with Advanced Sub-aperture Polishing technology, the lapping station is capable of producing surfaces that meet stringent flatness and roughness requirements. This ensures that the desired surface finish is achieved, while simultaneously minimizing thermal stress and ensuring maximum throughput. Finally, the LK Copper's polishing station is equipped with an array of automated processes that minimize surface defect levels and ensure a uniform surface finish. These processes include advanced planarization techniques, chemical-mechanical polishing (CMP) and electrochemical mechanical polishing (ECMP) capabilities, among other advanced techniques. The results of these processes are surfaces that meet the requirements for 3D conventional and 3D integrated circuits, including wafers sized up to 150 mm. Overall, AMAT / APPLIED MATERIALS Reflexion LK Copper wafer grinding, lapping and polishing machine provides an integrated solution for the fabrication of compound semiconductor materials suited for a variety of industry applications. The tool's components are designed for precision and reliability, enabling high process repeatability and maximum throughput. The LK Copper produces surfaces that meet stringent requirements for flatness and roughness, which ensure structural integrity and dimensional stability.
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