Used AMAT / APPLIED MATERIALS Reflexion LK FI #293822113 for sale

AMAT / APPLIED MATERIALS Reflexion LK is a wafer grinding, lapping and polishing equipment for materials research and production. The system is designed especially for R&D and production of lithography, silicon-on-insulator (SOI) and heterogeneous optoelectronic devices. The machine has a semiconductor grade wet grinder and polisher, and provides precise surface roughness with a predictable uniformity. It is capable of grinding surfaces from microns, lapping surfaces down to 1um and polishing surfaces down to 0.1um. Its height adjustable mounting base provides flexibility for batch operation, and its robot integrated design simplifies automation and eliminates manual handling of wafers. The integrated process temperature controller allows precise control of wafer temperature to within 0.1°C, which is crucial for improving precision and throughput. The auto balance function reduces machine vibration during processing, while proprietary manipulation tools ensure precise positioning and handling of wafers. AMAT Reflexion LK has advanced metrology capabilities, including three-dimensional (3D) non-contact surface characterization, automated defect detection and containment, and line edge roughness measurement. It has an integrated chamber mapping unit which enables the user to accurately track wafer lot numbers, processing date and sequence, and processing temperature evolution. The equipment is equipped with state-of-the-art safety features such as automatic door and shutdown systems for protection against dust accumulation, abrasion, and unsafe conditions. Automatic machine cleaning is also available. APPLIED MATERIALS Reflexion LK is an advanced wafer grinding, lapping and polishing tool that is suitable for a variety of materials research and production tasks. It offers high-precision surface preparation with fine control over temperature, surface uniformity, process automation, metrology, and safety.