Used AMAT / APPLIED MATERIALS Reflexion LK Reflexion LK #9283335 for sale
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ID: 9283335
Wafer Size: 12"
Vintage: 2012
Dielectric CMP system, 12"
Process: SIF, BPSG, Poly buff CMP
AMAT Reflexion LK:
(4) Heads
(3) Platen polishing systems
Dry in and dry out
Polisher skins
Gap wash
Load cup wafer exchanger
NOVA 3090 Next ready
(2) Monitors
Light tower
FOUP
WIP Delivery type
OHT Light curtain
E84 PI O Sensors and cables
E99 Carrier ID
Docked E99 reading capability
Docking flange shield
Frame configuration
Load ports
Load port operator interface
Operator access switch
Platen type
High pressure rinse flow meter
Rinse arms
Platen pad conditioner
Flow meter
Polishing technology
Polishing head
Cross break
Pad wafer loss sensor
Inter platen clean
Upper pneumatics assembly
ISRM Laser key switch
Slurry delivery system
Power cable (Head 1, Head 2, Head 3, Head 4)
Encoder cable (Head 1, Head 2, Head 3, Head 4)
Does not include Hard Disk Drive (HDD)
2012 vintage.
AMAT is a state-of-the-art wafer grinding, lapping and polishing equipment designed to deliver superior results for a variety of applications. AMAT / APPLIED MATERIALS Reflexion LK Reflexion LK system provides a number of advantages that make it ideal for production-level processes. It features a robust platform capable of processing wafers up to 300 mm in diameter, with up to eight grinding/lapping/polishing heads. This configuration delivers high throughput and versatility, enabling the unit to accommodate a wide range of applications. In addition, AMAT Reflexion LK is equipped with advanced closed-loop process control technology that ensures precision results. This precision is further complimented by the machine's Variable-Speed AC Spindle motor, which allows for a controlled material removal rate with uniform material abrasion. APPLIED MATERIALS REFLEXION LK Reflexion LK also features multiple clamping mechanisms that make it well-suited for a wide variety of workpieces. This includes a patented air-waft transfer clamp for accommodating planar substrates as well as the popular 5-point clamp for round wafers up to 200 mm in diameter. Other features of Reflexion LK include an innovative modular gearbox that allows for easy head configuration, upgradability, and serviceability. The machine also comes equipped with integrated machine health monitoring and diagnostics, providing a high level of operator visibility. And, the Reflexion's design allows for a variety of cleaning processes, including automated particulate cleaning and chemical/gas cleaning. All in all, APPLIED MATERIALS AMAT / APPLIED MATERIALS Reflexion LK Reflexion LK delivers a powerful performance designed to deliver superior results with repeatability and precision. The tool's high-tech programming, robust design, and wide range of clamping options make it well-suited for a variety of processes. With its advanced process control and integrated diagnostic/maintenance features, AMAT Reflexion LK provides the perfect solution for a range of wafer grinding, lapping, and polishing applications.
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