Used EBARA EPO-113 #293825811 for sale

EBARA EPO-113 is a wafer grinding, lapping, and polishing equipment designed for research and development applications. It is suited for grinding, lapping, and polishing wafers up to 200 mm in diameter and up to 5 mm thick. EBARA EPO 113 combines micro-processor technology with precision optical components to provide a stable grinding platform, while being capable of very long buffer length, long depth of field, and short cycle times. The system is capable of producing sub-micron surface finishes on the various types of chips; these very flat and smooth surfaces are ideal for the production of semiconductor devices. EPO-113 features an advanced motion controller which provides fast, accurate, and repeatable movements for sub-micron accuracy. It also has a 3D vision unit that can detect minute structural and surface changes on the wafer. The machine uses a closed chamber with hydrogen peroxide and argon atmosphere, which ensures clean and contamination-free grinding and lapping processes. EPO 113 is equipped with various tools and accessories, such as a vibratory pot, a diamond grinding wheel, a polishing platen, and an adjustable guide ring. These tools provide a wide range of applications, allowing the user to easily perform various types of grinding, lapping, and polishing operations. EBARA EPO-113 has a single-server control architecture, making it easy to use and monitor on a daily basis. The built-in safety features and reliable operation ensure that the tool runs smoothly and efficiently. Additionally, the user-friendly Graphical User Interface (GUI) makes operation simple, and eliminates the need to master complex commands. In conclusion, EBARA EPO 113 is a powerful and versatile tool for grinding, lapping, and polishing operations, making it a great choice for research and development applications. Its advanced motion controller and 3D vision asset make it easy to operate, with sub-micron accuracy, while its high-precision tools and safety features ensure reliable and efficient operation.