Used EBARA EPO-222 #9250491 for sale

EBARA EPO-222 is a wafer grinding, lapping and polishing equipment designed to process wafers at high efficiency and high precision. The system utilizes a unique patented process for superior performance and yield. With the advantage of fully automated operation, EBARA EPO222 is capable of both grinding and polishing wafers up to 20mm in size. Its compact and easy to use design makes it ideal for batch processing, choosing between manual or automatic loading of 2"x2" wafers into the tool. The process begins with the wafer being placed into EPO 222's process chamber and made to spin at a precise speed. As the wafer slowly spins, the grinding and lapping parameters can be adjusted as required to fine tune the desired finish for both the particle size as well as the particle distribution to ensure the best possible performance. The process can be optimized using EBARA proprietary "Stripe Processing" software. This software helps in optimizing the grinding and lapping to improve accuracy by allowing for faster cutting speeds and deeper cuts. Once this process is complete, the polishing process begins. The wafer is spinning on the chuck while the blade tip moves at a specific pressure, speed and feed rate. This process is done on the top and the bottom of the wafer and results in a mirror-like finish. The process can also be optimized with proprietary "Diamond Polishing" software which gives the ability to track the position of the polishing head to ensure high quality results. EPO222 is designed to work with either diamond, alumina or silicon carbide grinding and lapping discs. It is also possible to use EBARA metal and polymeric blades for the polishing process. This unit is capable of producing wafers with a RMS (Roughness Mean Standard) value as low as 0.2µm, making it a perfect choice for high precision grinding, lapping and polishing of semiconductor related materials at a high efficiency. This machine is ideal for processing applications in the display, medical, automotive, and semiconductor industries.