Used EBARA EPO-2226D #293749187 for sale

EBARA EPO-2226D is a state-of-the-art wafer grinding, lapping and polishing machine. Its unique design enables high precision, single-pass grinding, lapping and polishing of large wafers (up to 200mm in diameter) using only a single spindle. Since the spindle never leaves the wafer, there is no need for costly, complicated and inaccurate mechanical transfers between each process; thus allowing for greater accuracy and significantly reducing cycle times. EPO-2226D is driven by a high capacity spindle motor capable of providing torque up to 200Nm. Its multiple speed control supports all types of wafer grinding, lapping and polishing processes. This allows for the application of low, medium or high speed grinding, lapping and polishing, depending on the requirements for the process to reach the highest possible yields. The machine is powered by a Siemens PLC and a 19" HMI, continuously monitored for optimal operation and safety. This also allows for easy data input and operation, and creates an integrated system for easier maintenance and operation. EBARA EPO-2226D's high precision, closed-loop servo control system contributes to extremely accurate results and repeatability. This is achieved through its AC servo motor, which is able to quickly respond to changing conditions. It also uses two harmonic drives to be able to control centering and total pressure, while allowing multiple disk recognition with no manual calibration needed. EPO-2226D includes a full enclosure with dust collection and particle monitoring capabilities, making the equipment suitable for use in harsh environments. In order to improve safety and hygiene, a pressure and a flow sensor monitor the operation of the dust collection system, and a variety of additional protection and dust control elements, have been integrated into the design. The overall advantages of EBARA EPO-2226D are fast cycle times with precise, high-yield results in a safe and clean working environment. The machine has been designed to provide reliable, repeatable performance, allowing for long-term productivity and stability.