Used EBARA EPO-222A #9279381 for sale

EBARA EPO-222A is a wafer grinding, lapping, and polishing equipment that is well-suited for processing semiconductor wafers, crystalline quartz, ceramics, and other materials up to 8" in diameter. The system features an easy-to-use graphical user interface (GUI) that allows for parameter setting and process control. The machine utilizes a unique programmable AC spindle drive unit designed to provide precise speed and torque stability at low or high speed operation. The spindle is encased by a heavy-duty carriage with duplex bearings and pneumatic bearing to ensure reliable clamping of the grinding and lapping plate. The spindle angularity can be adjusted or maintained with high accuracy thanks to the precise alignment of the spindle head. EBARA EPO 222A offers a wide range of grinding, lapping, and polishing operations that are easily selectable with the integrated GUI. The grinding operations include planar grinding, semiconductor lapping, and micro-finish grinding. The lapping operations include CMP lapping and double-sided lapping. The polishing operations include sputtering, electropolishing, and chemical polishing. EPO 222 A is equipped with a fully integrated workholding solution that helps to ensure consistent and high-precision results. The advanced wafer chuck machine features vacuum clamps and adjustable blades that can be easily calibrated to provide the best results for each application. Additionally, the chuck tool utilizes feedback control to keep consistency during lapping and polishing processes. Furthermore, the machine is also equipped with a range of safety features to ensure maximum safety, reliability, and versatility. These safety features include a fully automated Emergency Stop asset, a triple-stage indicator light for workpiece and safety status, and an emergency stop switch. Additionally, a dedicated remote operation port is installed to enable the operator to make all parameter and control settings through the included GUI. For on-site maintenance, EPO-222A is equipped with an integrated maintenance pack consisting of spare parts, filter elements, and a variety of tools. Technicians also have access to specialized technical support services via hotline or e-mail, and any inquiries and complaints are welcomed and followed up promptly. EBARA EPO 222 A represents a reliable and advanced wafer grinding, lapping, and polishing model. It is designed to provide high-precision operations and reliable results, along with maximum safety, ease of use, and flexibility.